Application of Lloyd’s Mirror to X-Ray Holography*

Saccocio, Edward J.

doi:10.1364/josa.57.000966

Cited by 17 publications

(2 citation statements)

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“…Smeared by diffuse scattering from the surface roughness, the interference intensity due to Lloyd’s mirror effect decays and eventually is inundated in the background. Parenthetically, we note that the original Lloyd’s mirror concept was deemed not practical for hard X-ray applications 46 , 66 , 67 . Now we demonstrate that it can be ideally suited for creating holography and coherent imaging at the surfaces as a high-resolution hard X-ray structural probe.…”

Section: Resultsmentioning

confidence: 95%

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Probing three-dimensional mesoscopic interfacial structures in a single view using multibeam X-ray coherent surface scattering and holography imaging

Chu,

Jiang,

Wojcik

et al. 2023

Nat Commun

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Visualizing surface-supported and buried planar mesoscale structures, such as nanoelectronics, ultrathin-film quantum dots, photovoltaics, and heterogeneous catalysts, often requires high-resolution X-ray imaging and scattering. Here, we discovered that multibeam scattering in grazing-incident reflection geometry is sensitive to three-dimensional (3D) structures in a single view, which is difficult in conventional scattering or imaging approaches. We developed a 3D finite-element-based multibeam-scattering analysis to decode the heterogeneous electric-field distribution and to faithfully reproduce the complex scattering and surface features. This approach further leads to the demonstration of hard-X-ray Lloyd’s mirror interference of scattering waves, resembling dark-field, high-contrast surface holography under the grazing-angle scattering conditions. A first-principles calculation of the single-view holographic images resolves the surface patterns’ 3D morphology with nanometer resolutions, which is critical for ultrafine nanocircuit metrology. The holographic method and simulations pave the way for single-shot structural characterization for visualizing irreversible and morphology-transforming physical and chemical processes in situ or operando.

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Section: Resultsmentioning

confidence: 95%

“…On the other hand, Lloyd’s-mirror interferences were observed in radio waves, lasers, and soft X-rays, with applications such as plasma density measurement and surface metrology 46 – 49 . Thus far, Lloyd’s mirror-based holography involves the inference with the incident (or primary) waves (beams) in the bright field.…”

Section: Introductionmentioning

confidence: 99%