Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)
DOI: 10.1109/issm.2000.993672
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Application of hydrogenated water to future cooling system

Abstract: This study was carried all to cOTitribute the applicatioTi of hydrogeTiated water to future cooling water systenL In order to much improve Cost of Owtlership (CoO) of cooling water, we firstly introduced hydrogenated city water to cooling water system. Compared to a hydrogenated ultrapure wafer (H2·UPW), it is high pH value, resulting in having low oxidatioll-reductioll potential (ORP) value so that it has the characteristics of flowing out suppression all evell surface of iron pipeline. This applicaTion, base… Show more

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