“…The common methods are divided into interferometric and imaging-based methods. Interferometric methods include electric speckle pattern interferometry (ESPI) [ 1 , 2 , 3 , 4 ], shear interferometry [ 5 , 6 ], and holographic interferometry [ 7 , 8 , 9 ], and these methods generally produce subwavelength accuracy. Adopting high-efficiency phase extraction methods, such as the temporal phase-shifting method [ 10 , 11 ], spatial carrier phase-shifting method [ 12 , 13 ], and Fourier transform method [ 14 , 15 ], nanometer accuracy can be achieved under laboratory conditions.…”