Application of High Aspect Ratio Scanning Probe in Microstructure Measurement

Fu, Mingming; Guo, Kangan; Chen, Y.; Yang, Yongrong; Ju, Bing Feng

doi:10.4028/www.scientific.net/amr.69-70.123

Cited by 1 publication

(1 citation statement)

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“…However, the above method has high technical requirements and requires the support of very high-end equipment. Compared with the above-complicated method, it is simpler and more economical to obtain the small cone Angle probe with a slight curvature radius by electrochemical etching with tungsten [29][30][31][32]. A typical application is the Wollaston line probe proposed by Pylkki et al [33].…”

Section: Introductionmentioning

confidence: 99%

Design and realization of scanning probe microscope based on a T-shaped high-aspect-ratio probe

Xu,

Liu,

Ren

et al. 2023

Meas. Sci. Technol.

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With the growing importance of three-dimensional (3D) nanomaterials and devices, the use of high-aspect-ratio (HAR) probes in atomic force microscopy (AFM) imaging enables full-profile topography characterization. However, HAR-AFM probes are difficult to manufacture due to the expensive materials and complex processes. Inspired by the Wollaston scanning probe, we successfully fabricated a T-shaped tungsten probe and installed in a home-built scanning probe microscope (SPM) system. Compared with commercial AFM, the self-developed platform utilizes a set of LabVIEW control programs based on Field Programmable Gate Array (FPGA) hardware feedback, which improves the scanning speed and makes the control program more flexible. The reliability of the system was verified by comparing with the scanning results of commercial AFM. The T-shaped probe exhibits better fidelity in HAR-hole imaging compared to AFM standard pyramidal probes. This approach will likely find a convenient and material-saving fabrication route, especially for custom functional nanoprobes.

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