1977
DOI: 10.1016/0376-4583(77)90001-2
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Application of ellipsometry to surface films and film growth

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Cited by 15 publications
(3 citation statements)
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“…Spectroscopic ellipsometry is a technique that measures the change in the state of light polarization when light interacts with a surface. It is suitable for obtaining optical properties, such as the refractive index ( n ) and extinction coefficient ( k ) and for accessing the thickness of single- or multilayered thin films by using mathematical models. The interest in using this technique has been increasing owing to its high precision and fast, noninvasive, and nondestructive measurements …”
Section: Resultsmentioning
confidence: 99%
“…Spectroscopic ellipsometry is a technique that measures the change in the state of light polarization when light interacts with a surface. It is suitable for obtaining optical properties, such as the refractive index ( n ) and extinction coefficient ( k ) and for accessing the thickness of single- or multilayered thin films by using mathematical models. The interest in using this technique has been increasing owing to its high precision and fast, noninvasive, and nondestructive measurements …”
Section: Resultsmentioning
confidence: 99%
“…The reference positions of azimuths of the instrument were first determined (see Neal 1977a). With the compensator removed and using the wavelength for maximum sensitivity the polariser and analyser were rotated until an extinction position was obtained.…”
Section: Tests On Gold Samplesmentioning
confidence: 99%
“…3). After a vacuum measurement, the chamber is allowed to return to the ambient room pressure and temperature.…”
Section: Errors Associated With Ellipsometer Componentsmentioning
confidence: 99%