Application of electrospray-scanning mobility particle sizer for the measurement of sub-10 nm chemical mechanical planarization slurry abrasive size distribution

Abstract

A scanning mobility particle sizer (SMPS) was used for measuring the size of a sub-10 nm chemical mechanical planarization slurry abrasive. An atomizer and an electrospray were used for aerosolization of slurry abrasives. It was difficult to measure the exact particle size distribution using the atomizer due to the agglomeration peak generated by the relatively large droplet size. However, the electrospray-SMPS (ES-SMPS) measurement result well matched with that of the transmission electron microscopy analysis without the agglomeration peak as ES is known to generate a relatively small droplet during aerosolization. The particle size distribution of the two sub-10 nm ceria slurries was measured using the ES-SMPS. To avoid the dispersion stability issue due to the pH change, pH adjustment was required when the sample was diluted.

Evaluation of 3D-Printed Solid Microneedles Coated with Electrosprayed Polymeric Nanoparticles for Simultaneous Delivery of Rivastigmine and N-Acetyl Cysteine

“…SEM was employed to examine the surface morphology of the particles, and ImageJ was used to measure the particle size distribution. ImageJ is open-source software, which is commonly used for particle size characterization in the field of pharmaceutical technology. , The particle size distribution was calculated by averaging the particle size of 250 particles from three different SEM images, which were loaded into software. − …”

“…ImageJ is open-source software, which is commonly used for particle size characterization in the field of pharmaceutical technology. 26,27 The particle size distribution was calculated by averaging the particle size of 250 particles from three different SEM images, which were loaded into software. 28−30 Fourier-Transform Infrared (FTIR) Analysis.…”