Application of Dynamic Scaling to the Surface Properties of TiC_xN_1-x Nano Films

Abstract

The surface evolution of TiCxN1-x nano films, formed by multi-arc ion plating (MAIP) on pure aluminum foil substrates, has been investigated using atomic force microscopy (AFM). Results are analyzed using dynamic scaling theory. TiCxN1-x nano film had a smooth-rough-smooth period and two distinct stages. In stages I, high values are obtained for dynamic scaling coefficients α=0.65±0.04, β=0.50±0.05, α+α/β≈2, where α is the roughness exponent and β is the growth exponent, it was KPZ universality type. In stage Ⅱ , the roughness exponent α was 0.35 and the surface roughening rate slowed down.