Aim of the study is to develop a simulation software for the prediction of internal corrosion during high temperature applications. Besides a significant mass transport by diffusion, chemical reactions, and phase transformations are occurring at elevated temperatures. Eventually, corrosion results in a severe deterioration of the properties of a material. During the last 6 decades, great effort has been put into quantitative identification of the relevant mechanisms of high temperature corrosion in metallic alloys. Recently, the cellular automata approach was identified to be a powerful tool to describe diffusioncontrolled transformation processes. Up to now, the model is able to predict diffusion-controlled nucleation and growth, internal precipitation kinetics and the transition from internal precipitation to external scale formation, distinguishing between bulk and grain boundary diffusion. Within this study, the cellular automata approach was used to describe TiN formation in Ni-20Cr-2Ti, MnO formation in a Mn-steel containing 3.7 wt% Mn and intergranular Al 2 O 3 formation in Inconel 625Si. It is shown that experimental and simulated results are in good agreement.