Application Of Carbon Nanotubes And Reduced Graphene Oxide Layers For Ohmic Contacts To p–GaN

Abstract

Due to their properties, carbon nanotubes and reduced graphene oxide are highly promising materials for obtaining low-resistance ohmic contacts to p-GaN with good optical transparency for visible light. In this contribution we designed a combination of these two materials, along with a cap layer, to be used as structures for ohmic contacts to p-GaN. Carbon nanotube (CNT) and graphene oxide (GO) layers were deposited by spray coating using an off-the-shelf airbrush on pGaN layers. The metallic layers of Au/Pd were vapour deposited. The structures for ohmic contacts were prepared in two configurations, namely as Au/Pd/r-GO/CNT/p-GaN and Au/Pd/CNT/r-GO/CNT/p-GaN. The prepared structures provide a low resistivity ohmic contact after subsequent annealing in air ambient at 600 • C for 3 minutes. The contact containing the sandwich CNT /r-GO/CNT interstructure exhibits lower values of contact resistance in comparison with the r-GO/CNT interstructure.K e y w o r d s: