Application of bulk silicon carbide technology in high temperature MEMS sensors

Zhai, Yanxin; Li, Haiwang; Wu, Hanxiao; Tao, Zhi; Xu, Guoqiang; Cao, Xiaoda; Xu, Tiantong

doi:10.1016/j.mssp.2024.108137

Materials Science in Semiconductor Processing

2024

DOI: 10.1016/j.mssp.2024.108137

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Application of bulk silicon carbide technology in high temperature MEMS sensors

Yanxin Zhai,

Haiwang Li,

Hanxiao Wu

et al.

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Application of bulk silicon carbide technology in high temperature MEMS sensors

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