“…After the TiO x deposition, hydrogen plasma treatment (HPT) was performed to improve the passivation performance. 37) There are many process parameters for HPT, including process temperature (T HPT ), process time (t HPT ), H 2 pressure (p H2 ), H 2 flow rate (R H2 ), RF power (P RF ), and electrode distance (d). In this study, these parameters were set at T HPT = 373 K, t HPT = 90 s, p H2 = 100 Pa, R H2 = 70 sccm, P RF = 390 W, d = 10 mm based on our previous work.…”