Application of Al2O3-based polyimide composite thick films to integrated substrates using aerosol deposition method

Kim, H.J.; Yoon, Young Joon; Kim, J.H.; Nam, Song−Min

doi:10.1016/j.mseb.2008.12.041

Cited by 20 publications

(16 citation statements)

References 21 publications

(22 reference statements)

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“…Al 2 O 3 -polymer composite thick films were successfully fabricated by AD and its good dielectric properties www.elsevier.com/locate/ceramint were confirmed [7][8][9]. The decrement of the crystallite size of Al 2 O 3 ceramics in Al 2 O 3 -polymer composite films was reduced due to the cushion-effect of the polymer.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of BaTiO3-PTFE composite film for embedded capacitor employing aerosol deposition

Kim

Koh

et al. 2011

Ceramics International

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Section: Introductionmentioning

confidence: 99%

Fabrication of BaTiO3-PTFE composite film for embedded capacitor employing aerosol deposition

Kim

Koh

et al. 2011

Ceramics International

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“…Previous reports on AD-processed film have shown that the porous films as well as ceramic/polymer composite films exhibit lower internal stresses than the regular processed AD film. [26][27][28] In addition, although we have not observed any significant difference in the grain size as well as in the crystallite size of dense and porous BaTiO 3 film ( Figures S1-S4), it is known that the AD-processed film exhibits inhomogeneous grain size. Therefore, it is possible that the presence of NaCl, that is, co-deposition of BaTiO 3 /NaCl shifted the BaTiO 3 grain size distribution toward larger grains and resulted in an increase in permittivity.…”

Section: Resultsmentioning

confidence: 59%

Fabrication of porous thick films using room‐temperature aerosol deposition

et al. 2019

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A novel technique for the rapid room‐temperature deposition of porous ceramic, glass, or metal thick films using the aerosol deposition (AD) method is presented. The process is based on the co‐deposition of the desired film material and a second water‐soluble constituent, resulting in a ceramic‐ceramic composite. Following the subsequent removal of water‐soluble end member, a network of pores is retained. To demonstrate the process, porous BaTiO3 thick films were fabricated through co‐deposition with NaCl. Microstructural images show the clear development of a porous structure, which was found to enhance the dielectric properties over dense thick films, possibly related to the lower extent of internal residual stress. This simple but highly effective porous structure fabrication can be applied to any film and substrate material stable in water and is promising for the application of AD‐processed films in gas sensors, solid oxide fuel cells, and humidity sensors.

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“…As invented by J. Akedo in the 1990s (Ref [12][13][14], AD is a solvent-free solid state kinetic spraying method for the deposition of small-sized ceramic particles onto various substrate materials, usually operating at room temperature. At present, it provides solutions for a wide field of applications ( Ref 12,[15][16][17]. Figure 1 illustrates the principle.…”

Section: Introductionmentioning

confidence: 99%

Aerosol-Deposited BiVO4 Photoelectrodes for Hydrogen Generation

Wolpert

Emmler²,

Vidaller

et al. 2020

J Therm Spray Tech

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Hydrogen generation from renewable energy sources will play a key role in the concerted endeavor to constrain climate change. One environmentally friendly route, powered by sunlight, is the photoelectrochemical water splitting cell (PEC). This technology employs electrodes coated with thin films of semiconductor materials to capture light and generate charge carriers that directly drive the water splitting reaction. Bismuth vanadate is a promising metal oxide semiconductor, as it absorbs visible light, and is abundant, non-toxic and cost-effective. The present study investigates the formation of bismuth vanadate thin films by the aerosol deposition (AD) method. Operating with layer formation at room temperature, AD offers advantages over other routes for the fabrication of photoactive thin film coatings, as no binders or sintering processes need to be applied. Furthermore, compared to traditional cold spraying, micrometer-sized particles can be used, resulting in coatings with thicknesses below 1 µm. Additionally, the lower kinetic energy of the feedstock powder particles enables the use of delicate substrates, such as FTO-coated glass, expanding the range of possible PEC device configurations. The process parameters explored in this study had considerable influence on the resulting coating microstructure, which in turn showed a significant impact on the photoelectrochemical performance.

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Application of Al2O3-based polyimide composite thick films to integrated substrates using aerosol deposition method

Cited by 20 publications

References 21 publications

Fabrication of BaTiO3-PTFE composite film for embedded capacitor employing aerosol deposition

Fabrication of BaTiO3-PTFE composite film for embedded capacitor employing aerosol deposition

Fabrication of porous thick films using room‐temperature aerosol deposition

Aerosol-Deposited BiVO4 Photoelectrodes for Hydrogen Generation

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