Application of a membrane reactor and an ultra-short packed gas chromatographic column to optimize the gas selectivity of a resistive thin film gas sensor

Stürmann, J.; Junge, S.; Benecke, W.; Zampolli, S.; Nicoletti, S.

doi:10.1109/memsys.2003.1189770

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The Si-micromachined Gas Chromatographic Column1

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“…The detailed technological fabrication process of the micromachined GC columns can be found elsewhere [5]. Fig.…”

Section: The Si-micromachined Gas Chromatographic Columnmentioning

confidence: 99%

“…In this miniaturized gas chromatographic (GC) system a solid state Metal Oxide Semiconducting (MOX) gas sensor is used as detector, together with a Si micromachined packed GC column [5], a zero grade air unit, a commercial minipump and a minivalve. The use of silicon micromachining technology for the realization of miniaturized gas chromatographic columns was previously reported, e.g.…”

Section: Introductionmentioning

confidence: 99%

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