Application and realization of Norland optical adhesive 73 novel photosensitive macromolecular material for the rapid preparation of periodically tunable nanoscale gratings

Abstract

Periodically tunable nano-gratings have an irreplaceable role in spectral scanning and optical communication, but the performance of gratings manufactured from different materials varies considerably, and the development of superior materials has energized the preparation of high-precision devices. This paper presents a nanoscale preparation process based on Norland Optical Adhesive 73 (NOA73), which enables the rapid preparation of periodically tunable nano-gratings with up to 100% light transmission. The powerful fluidity and shear rate of NOA73 make it uniquely suited to the preparation of precision devices, allowing the production of up to dense grating structures and offering the possibility of making nanoscale gratings. This paper uses multi-angle hierarchical lithography, die stretching, and replication to achieve further improvements in accuracy and successfully prepare gratings with a period of 500 nm. The successful preparation of NOA73 nano-gratings demonstrates the practicality of NOA73 as a material for precision device fabrication.