2018
DOI: 10.1109/tvlsi.2018.2828387
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Application and Product-Volume-Specific Customization of BEOL Metal Pitch

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Cited by 8 publications
(4 citation statements)
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“…Notice the significant increase in metals M5, M6, and M7. Also, note that the lower metal layers are more closely associated with the circuit performance [28], so overheads in M5 and above are unlikely to affect critical paths. We also provide a visual comparison of the density increase for the AES HFHD and PST HFHD SCTs in the bottom part of Fig.…”
Section: Sct Insertion Resultsmentioning
confidence: 99%
“…Notice the significant increase in metals M5, M6, and M7. Also, note that the lower metal layers are more closely associated with the circuit performance [28], so overheads in M5 and above are unlikely to affect critical paths. We also provide a visual comparison of the density increase for the AES HFHD and PST HFHD SCTs in the bottom part of Fig.…”
Section: Sct Insertion Resultsmentioning
confidence: 99%
“…Notice the significant increase in metals M5, M6, and M7. Also note that the lower metal layers are more closely associated with the circuit performance [26], so overheads in M5 and above are unlikely to affect critical paths. We also provide a visual comparison of the density increase for the AES HFHD and PST HFHD SCTs in the bottom part of Fig.…”
Section: Sct Insertion Resultsmentioning
confidence: 99%
“…For a thorough discussion and silicon results on BEOL-related overheads, please refer to[18].4 VOLUME XXX, 2020…”
mentioning
confidence: 99%