Application and improvement of Canny edge-detection algorithm for exterior wall hollowing detection using infrared thermal images

Lu, Youcun; Lin, Defu; Zhai, Zhiqiang; Wang, Zongshan

doi:10.1016/j.enbuild.2022.112421

Cited by 35 publications

(19 citation statements)

References 20 publications

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“…The Canny edge detection algorithm is a multilevel edge detection algorithm developed by Canny in 1986. 15 It has outstanding detection accuracy and the highest signal-to-noise ratio 16 and has been widely used in medicine, 17 cryptography, and engineering. 18 High-precision edge detection is also the key to evaluating the quality of photoresist patterns; however, the application of the Canny algorithm in the lithography field is barely reported.…”

Section: Ler/lwr Calculation Processmentioning

confidence: 99%

Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography

Zhao

Wang

et al. 2023

ACS Omega

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The line edge roughness (LER) is one of the most critical indicators of photoresist imaging performance, and its measurement using a reliable method is of great significance for lithography. However, most studies only investigate photoresist resolution and sensitivity because LER measurements require an expensive and not widely available critical dimension scanning electron microscopy (SEM) technology; thus, the imaging performance of photoresist has not been adequately evaluated. Here, we report an image processing software developed for offline calculation of LER that can analyze lithographic patterns with resolutions up to ∼15 nm. This software can effectively process all graphic files obtained from commonly used SEM machines by utilizing the adjustable double threshold. To realize the effective detection of high-resolution patterns in advanced lithography, we used SEM images generated from extreme ultraviolet and electron beam lithography to develop and validate the software's graphic recognition algorithm. This image processing software can process typical SEM images and produce reliable LER in an efficient and user-friendly manner, constituting a powerful tool for promoting the development of high-performance photoresist materials.

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Section: Ler/lwr Calculation Processmentioning

confidence: 99%

Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography

Zhao

Wang

et al. 2023

ACS Omega

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“…Canny assumes that h ′′ n (0) = 0. Therefore, simplifying Equation (5) by bringing in E[x 2 max ] = E[h ′ n (0) 2 ]∕h ′′ g (0) 2 , the position can be expressed by the following equation:…”

Section: Theoretical Foundationmentioning

confidence: 99%

“…Edges are the basic features of an image and an important source of information for texture features and the basis for shape feature analysis [1,2]. The Canny edge detection method is widely used in the field of computer vision and image analysis [3,4].…”

Section: Introductionmentioning

confidence: 99%

Geo‐information mapping improves Canny edge detection method

Yang

Tongxin

et al. 2023

IET Image Processing

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Aiming at the shortcomings of the current Canny edge detection method in terms of noise removal, threshold setting, and edge recognition, this paper proposes a method for improving Canny edge detection by geo‐information mapping. The shortcomings of the traditional Canny edge detection method are analyzed by using the Canny optimal criterion and Tobler's First Law, which points out the direction of edge detection optimization by using the difference between edge properties and noise properties. The property characteristics and spatial distribution rules of edge points and edge lines are inspected using the geographic information mapping theory and technical methods, and edge identification criteria are defined at two levels of edge points and edge lines. Finally, the method model of improved Canny edge detection is constructed by combining guided filtering. The experimental results show that the improved edge detection method has the advantages of enriched edge details, accurate edge recognition, and strong self‐adaptive capability. This is a new attempt of geo‐information mapping theory and technical method in image edge detection, which has certain theoretical significance and strong practical guidance.

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“…Canny is a multi-criterion edge detector (Canny, 1986), which includes finding the most edges by minimizing the error rate, marking edges as closely as possible to the actual edges and marking edges only once when a single edge exists for minimal response. Compared to other operators, Canny has superior performance in almost all aspects, and therefore it is still widely used in various fields (Lu et al , 2022) until now.…”

Section: Introductionmentioning

confidence: 99%

A satellite component contour extraction method for lightweight space mobile platforms

Zhu

Liang

2023

AEAT

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Purpose Owing to the complex space environment and limited computing resources, traditional and deep learning-based methods cannot complete the task of satellite component contour extraction effectively. To this end, this paper aims to propose a high-quality real-time contour extraction method based on lightweight space mobile platforms. Design/methodology/approach A contour extraction method that combines two edge clues is proposed. First, Canny algorithm is improved to extract preliminary contours without inner edges from the depth images. Subsequently, a new type of edge pixel feature is designed based on surface normal. Finally, surface normal edges are extracted to supplement the integrity of the preliminary contours for contour extraction. Findings Extensive experiments show that this method can achieve a performance comparable to that of deep learning-based methods and can achieve a 36.5 FPS running rate on mobile processors. In addition, it exhibits better robustness under complex scenes. Practical implications The proposed method is expected to promote the deployment process of satellite component contour extraction tasks on lightweight space mobile platforms. Originality/value A pixel feature for edge detection is designed and combined with the improved Canny algorithm to achieve satellite component contour extraction. This study provides a new research idea for contour extraction and instance segmentation research.

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Application and improvement of Canny edge-detection algorithm for exterior wall hollowing detection using infrared thermal images

Cited by 35 publications

References 20 publications

Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography

Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography

Geo‐information mapping improves Canny edge detection method

A satellite component contour extraction method for lightweight space mobile platforms

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