Apparatus for pulsed laser deposition of semiconductor thin films

Oszwałdowski, M.; Berus, T.; Sydorczuk, P.; Rzeszutek, J.

doi:10.1063/1.1571947

Cited by 5 publications

(3 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The PLA apparatus used in our experiments is described in detail elsewhere [13]. The apparatus consist of a quadrupole mass spectrometer (QMS, HALO 301, Hiden Analytical) equipped with a pulse ion counter.…”

Section: Experimental Set-upmentioning

confidence: 99%

Ablation of CdTe with 100 µs Nd:YAG laser pulses: dependence on target preparation method

Rzeszutek¹,

Oszwałdowski²,

Savchuk³

2007

Cryst. Res. Technol.

Self Cite

View full text Add to dashboard Cite

The results of experimental studies of the ablation of CdTe with a pulsed Nd:YAG laser (wavelength 1064 nm) performed with 100 µs pulses and repetition time of 35 Hz are presented for the pulse energy range from 0.13 to 0.25 J. The main goal is to elucidate the dependence of the ablation process on the target preparation method. The investigation of the vapour stream intensity and chemical composition and their evolution with time are performed with a quadrupole mass spectrometer synchronized with the laser pulses. These studies are performed for three kinds of targets: a target made of CdTe bulk crystal (BC target), a target made of CdTe fine powder pressed under the pressure of 700 atm (PP target), and a target made of loose CdTe powder (N-PP target). The applicability of these targets for obtaining high quality CdTe thin films is determined. The best chemical composition of the vapour stream can be obtained with the BC target. A major drawback of this target is the energetic threshold for ablation with Nd:YAG laser and resulting delay in the ablation process above the threshold. The advantage of powder targets over BC target is the lack of any ablation threshold or delay. Weaker angular dependence of the particle emission (associated with the surface roughness), if confirmed in further experiments, can be the most important advantage of PP and N-PP targets.

show abstract

Section: Experimental Set-upmentioning

confidence: 99%

Ablation of CdTe with 100 µs Nd:YAG laser pulses: dependence on target preparation method

Rzeszutek¹,

Oszwałdowski²,

Savchuk³

2007

Cryst. Res. Technol.

Self Cite

View full text Add to dashboard Cite

show abstract

“…We describe briefly an original and low-cost apparatus for the PLD of II-VI compounds and their mixed crystals. A detailed description of this apparatus is given in [5]. The main novelty of the proposed solution, in comparison with the known solutions [1][2][3][4], is the use of a tripod-based optical switch that switches the laser radiation between three rotating targets in a time shorter than 0.1 s. The operation of the switch is computer controlled, and thereby a variety of layered thin film structures, made of the A 2 -B 6 compounds or their mixtures, can be obtained.…”

Section: Introductionmentioning

confidence: 99%

Pulsed laser deposition of II–VI semiconductor thin films and their layered structures

Oszwałdowski

Berus

Rzeszutek

et al. 2004

Journal of Alloys and Compounds

Self Cite

View full text Add to dashboard Cite

“…The concave mirror reflects the beam onto a flat mirror of the optical deflector, which directs the beam through an opening in the substrate holder/heater onto a surface of one of the targets. Other details of the apparatus construction less important for the present studies can be found in the source article (Oszwałdowski et al, 2003 ) Quadrupol Mass Spectrometer (QMS) The apparatus is supplied with a quadrupole mass spectrometer (QMS, HALO 301, Hiden Analytical) equipped with a pulse ion counter. The action of the QMS is synchronized with the laser action by a specially designed electronic device.…”

Section: Introductionmentioning

confidence: 99%