Antiresonant reflecting optical waveguides in SiO2-Si multilayer structures

Duguay, M. A.; Kimura, Yasuo; Koch, Thomas; Pfeiffer, L. N.

doi:10.1063/1.97085

Cited by 627 publications

(310 citation statements)

References 3 publications

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“…9. The layers nearest the hollow core are grown to thicknesses dictated by the ARROW confinement principle (Duguay et al 1986) and are around 100-200 nm thick. The topmost layer is a silicon dioxide film grown to around 3 µm thick.…”

Section: Thin-film Planar Fabrication and Structuresmentioning

confidence: 99%

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Optofluidic waveguides: II. Fabrication and structures

Hawkins

Schmidt

2007

Microfluid Nanofluid

110

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We review fabrication methods and common structures for optofluidic waveguides, defined as structures capable of optical confinement and transmission through fluid filled cores. Cited structures include those based on total internal reflection, metallic coatings, and interference based confinement. Configurations include optical fibers and waveguides fabricated on flat substrates (integrated waveguides). Some examples of optofluidic waveguides that are included in this review are Photonic Crystal Fibers (PCFs) and two-dimensional photonic crystal arrays, Bragg fibers and waveguides, and Anti Resonant Reflecting Optical Waveguides (ARROWs). An emphasis is placed on integrated ARROWs fabricated using a thin-film deposition process, which illustrates how optofluidic waveguides can be combined with other microfluidic elements in the creation of lab-on-a-chip devices.

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Section: Thin-film Planar Fabrication and Structuresmentioning

confidence: 99%

“…, Barber et al (2005Barber et al ( , 2006a, Duguay et al (1986), Hubbard et al (2005), Lee et al (2007), Schmidt et al (2006), Hawkins et al (2007) …”

mentioning

confidence: 99%

Optofluidic waveguides: II. Fabrication and structures

Hawkins

Schmidt

2007

Microfluid Nanofluid

110

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“…Figure 1 shows the general structure, which includes a hollow-core anti-resonant reflective optical waveguide (ARROW) capable of guiding light through a liquid filled low refractive index core. Intersecting the hollow-core is a solid-core ridge waveguide [4]. These solid-core waveguides allow for light to be coupled on and off the chip via butt coupling with fiber optics.…”

Section: Arrow Biosensormentioning

confidence: 99%

“…The ARROW waveguide in our biosensor makes use of a dielectric stack to create interference and guide light through a low refractive index core [4]. We use a stack of 6 alternating SiO2 and Ta2O5 layers [6].…”

Section: Deposit Bottom Arrow Layersmentioning

confidence: 99%

Materials and microfabrication processes for ARROW-based optofluidic biosensors

Wall

Parks

Schmidt

et al. 2015

2015 IEEE 58th International Midwest Symposium on Circuits and Systems (MWSCAS)

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Abstract-This paper outlines the microfabrication processes and materials used to make an optofluidic lab-on-a-chip biosensor that detects individual biological particles. The biosensor uses a hollow-core ARROW waveguide with a low refractive index liquid core and is fabricated on a silicon wafer using a combination of PECVD deposition, RIE etching, and standard photolithographic processes. As a sensing example, detection of fluorescence signals emitted by labeled oligonucleotides inside the liquid core was used to illustrate the chip's potential to identify protein-coding regions of the Zaire Ebola virus genome.

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“…We have also considered the effect of first interface layer and slightly different waveguide characteristics have been found for the two different interface materials. Our proposed waveguide can be easily fabricated by current fabrication technology 43,44 and may find suitable applications in deep sub-wavelength optics such as light guiding, routing, sensing etc.…”

Section: Introductionmentioning

confidence: 99%

All dielectric metamaterial loaded tunable plasmonic waveguide

2017

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In this article, a 2D plasmonic waveguide loaded with all dielectric anisotropic metamaterial, consisting of alternative layers of Si-SiO 2 , has been theoretically proposed and numerically analyzed. Main characteristics of waveguide i.e. propagation constant, propagation length and normalized mode area have been calculated for different values of ridge width and height at telecommunication wavelength. The respective 1D structure of the waveguide has been analytically solved for the anisotropic ridge as a single uniaxial medium with dielectric tensor defined by Effective Medium Theory (EMT). The 2D structure has been analyzed numerically through FEM simulation using Mode analysis module in Comsol Multiphysics. Both the EMT and real multilayer structure have been considered in numerical simulations. Such structure with all dielectric metamaterial provides an extra degree of freedom namely fill factor, fraction of Si layer in a Si-SiO 2 unit cell, to tune the propagation characteristics compared to the conventional DLSSP waveguide. A wide range of variations in all the characteristics have been observed for different fill factor values. Besides, the effect of the first interface layer has also been considered. Though all dielectric metamaterial has already been utilized in photonic waveguide as cladding, the implementation in plasmonic waveguide hasn't been investigated yet to our best knowledge. The proposed device might be a potential in deep subwavelength optics, PIC and optoelectronics.

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Antiresonant reflecting optical waveguides in SiO2-Si multilayer structures

Abstract: A new type of optical waveguide utilizing an antiresonant reflector is described. Implementation in the SiO2-Si system gave losses as low as 0.4 dB/cm for the TE mode. The TM mode loss is >60 dB/cm, making the device an excellent planar technology integrated optic polarizer.

Cited by 627 publications

References 3 publications

Optofluidic waveguides: II. Fabrication and structures

Optofluidic waveguides: II. Fabrication and structures

Materials and microfabrication processes for ARROW-based optofluidic biosensors

All dielectric metamaterial loaded tunable plasmonic waveguide

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Antiresonant reflecting optical waveguides in SiO2-Si multilayer structures

Abstract: A new type of optical waveguide utilizing an antiresonant reflector is described. Implementation in the SiO2-Si system gave losses as low as 0.4 dB/cm for the TE mode. The TM mode loss is &gt;60 dB/cm, making the device an excellent planar technology integrated optic polarizer.

Cited by 627 publications

References 3 publications

Optofluidic waveguides: II. Fabrication and structures

Optofluidic waveguides: II. Fabrication and structures

Materials and microfabrication processes for ARROW-based optofluidic biosensors

All dielectric metamaterial loaded tunable plasmonic waveguide

Contact Info

Product

Resources

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Abstract: A new type of optical waveguide utilizing an antiresonant reflector is described. Implementation in the SiO2-Si system gave losses as low as 0.4 dB/cm for the TE mode. The TM mode loss is >60 dB/cm, making the device an excellent planar technology integrated optic polarizer.