2017
DOI: 10.7567/jjap.56.022202
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Antireflective surface with a step in the taper: Numerical optimization and large-area fabrication

Abstract: In this study, we developed a practical method to improve the optical performance of subwavelength antireflective two-dimensional (2D) gratings. A numerical simulation of both convex and concave paraboloids suggested that surface reflectivity drastically decreases when a step is introduced in the taper. The optimum height and depth of a step provided average reflectances of 0.098% for convex protrusions and 0.040% for concave protrusions in the visible range. Furthermore, a stepped paraboloid was experimentall… Show more

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Cited by 3 publications
(2 citation statements)
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References 68 publications
(108 reference statements)
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“…The original microstripe structure (master mold) was initially fabricated at the surface of a single crystal Si substrate (Miller index of the crystal plane 110) by a lithographic process using a monolayer colloidal particle mask formed by the Langmuir-Blodgett method and a subsequent plasma etching process (figure 1(a)) [6][7][8]. Spherical colloidal silica of ca.…”
Section: Nanofabrication Processmentioning
confidence: 99%
“…The original microstripe structure (master mold) was initially fabricated at the surface of a single crystal Si substrate (Miller index of the crystal plane 110) by a lithographic process using a monolayer colloidal particle mask formed by the Langmuir-Blodgett method and a subsequent plasma etching process (figure 1(a)) [6][7][8]. Spherical colloidal silica of ca.…”
Section: Nanofabrication Processmentioning
confidence: 99%
“…A stepped concave paraboloid, fabricated on the whole surface of a 6 in. Si wafer (sufficient size for industrial utilization) by dry etching exhibited a measured reflectance of 0.077% on average in the visible range [54].…”
Section: Ii4 Silicon Nanoparaboloidsmentioning
confidence: 99%