Abstract:The powder and plate of aluminum nitride were exposed to chlorine trifluoride gas at the concentration of 100% and at atmospheric pressure for 10 min and temperatures up to about 1000 °C. With the increasing temperature, the weight of the aluminum nitride plate increased in the temperature range between 750 °C and 800 °C, while it decreased at temperatures higher than 800 °C. The thickness also increased at temperatures higher than 750 °C. The change in the aluminum nitride plate thickness showed a peak at 800… Show more
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