1997
DOI: 10.1063/1.119992
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Antenna-coupled polycrystalline silicon air-bridge thermal detector for mid-infrared radiation

Abstract: Polycrystalline silicon (polysilicon) airbridges coupled to log-periodic and bow-tie planar antennas have been fabricated for mid-infrared radiation detection. The detectors in thermocouple and bolometer modes exhibit a higher electrical responsivity than previously reported metal based antenna-coupled thermal detectors. Measurements made at 10.2 μm wavelength indicate that the linearly polarized antennas have an on-axis cross-polarization ratio of about −4.5 dB and the pattern in the free-space side has a dir… Show more

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Cited by 35 publications
(10 citation statements)
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“…2, 3 Advances in the fabrication and measurement of these devices make their application in different regions of the electromagnetic spectrum possible. 1 Previous work has reported promising results on the use of various planar nano-antenna geometries for long-wave infrared detection ($10 lm), [4][5][6][7][8][9] however, all the measurements were performed exclusively in the far-field. However, excitation and energy transfer to the bolometric element are largely dictated by the local near-field properties of the antenna.…”
Section: Introductionmentioning
confidence: 99%
“…2, 3 Advances in the fabrication and measurement of these devices make their application in different regions of the electromagnetic spectrum possible. 1 Previous work has reported promising results on the use of various planar nano-antenna geometries for long-wave infrared detection ($10 lm), [4][5][6][7][8][9] however, all the measurements were performed exclusively in the far-field. However, excitation and energy transfer to the bolometric element are largely dictated by the local near-field properties of the antenna.…”
Section: Introductionmentioning
confidence: 99%
“…The device can be supplied by an electric heater on the membrane and then it can sense the gas flow as it results in the cooling of the heater [3]; in addition this construction is an electronic device realizing Quadratic Transfer Characteristics [4]. Regarding the THz and mid-infrared radiation the thermopiles were used only for read-out the temperature increment caused by absorption of the radiation in the feedpoint resistance of the metallic antenna [5], or in the thin-film absorber [6].…”
Section: Introductionmentioning
confidence: 99%
“…One of the potential applications of the optical antennas is to enhance the sensitivity of optical detectors, particularly infrared photodetectors. [4][5][6][7] High performance semiconductor-based photodetectors such as HgCdTe photoconductors and quantum well infrared photodetectors all require cryogenic cooling to operate. 8 Those infrared detectors are expensive and not trivial to scale down for portable infrared systems.…”
Section: Introductionmentioning
confidence: 99%