2013
DOI: 10.1117/12.2024861
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Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging

Abstract: CEA-Leti has developed a monolithic large focal plane array bolometric technology optimized for 2D real-time imaging in the terahertz range. Each pixel consists in a silicon microbolometer coupled to specific antennas and a resonant quarter-wavelength cavity. First prototypes of imaging arrays have been designed and manufactured for optimized sensing in the 1-3.5THz range where THz quantum cascade lasers are delivering high optical power. NEP in the order of 1 pW/sqrt(Hz) has been assessed at 2.5 THz.This pape… Show more

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Cited by 5 publications
(5 citation statements)
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“…The latest developments of micro-bolometer arrays for use in the THz range above 0.6 THz, viz. wavelengths shorter than 500 μm, include cameras from the National Optics Institute (INO, Québec, Canada) [ 11 ], the NEC Corporation (Tokyo, Japan) [ 12 ], and the French Alternative Energies and Atomic Energy Commission (CEA Leti) [ 13 , 14 ]. Very recently a non-thermal large-size two-dimensional detector based on a commercial Si CCD has been reported for the visualization of intense THz pulses [ 15 , 16 ].…”
Section: Introductionmentioning
confidence: 99%
“…The latest developments of micro-bolometer arrays for use in the THz range above 0.6 THz, viz. wavelengths shorter than 500 μm, include cameras from the National Optics Institute (INO, Québec, Canada) [ 11 ], the NEC Corporation (Tokyo, Japan) [ 12 ], and the French Alternative Energies and Atomic Energy Commission (CEA Leti) [ 13 , 14 ]. Very recently a non-thermal large-size two-dimensional detector based on a commercial Si CCD has been reported for the visualization of intense THz pulses [ 15 , 16 ].…”
Section: Introductionmentioning
confidence: 99%
“…For a review on the use of uncooled bolometer-type infrared detectors for real-time THz imaging, see also [88,89]. Microbolometers specifically designed for THz radiation include cameras from the National Optics Institute (INO, Québec, Canada) [90], the NEC Corporation (Tokyo, Japan) [91], and the French Alternative Energies and Atomic Energy Commission (CEA Leti) [92,93].…”
Section: Thz Detectorsmentioning
confidence: 99%
“…According to different detection methods, terahertz imaging can be divided into array imaging and point-by-point scanning imaging [11]. Array imaging usually uses CCD cameras [12], CMOS cameras [13] or microbolometer cameras [14] as the detectors, which has advantages of high integration and real-time imaging. However, due to the limitation of THz array detectors, the resolution of array imaging cannot be very high.…”
Section: Introductionmentioning
confidence: 99%