In order to investigate the effects of lattice mismatch between FePt thin films and single-crystal substrates on the tetragonality and magnetization process, FePt thin films were fabricated on several single-crystal substrates such as KTaO3 (KTO) (100), MgAl2O4 (MAO) (100), and MgO(100) at a substrate temperature of 700 °C. The Fe content of the FePt films was varied from 45.0 to 50.8 at. %. In addition to the fundamental (002) peak, the (001) and (003) superlattice peaks were clearly observed in the X-ray diffraction patterns of all the samples, indicating the formation of the L10-ordered structure. The magnetization measurements show that all the samples were perpendicularly magnetized. Coercivities (Hc) of 57.8, 52.5, and 3.3 kOe were obtained for the films with Fe49.3Pt50.7 (at. %) deposited on the MgO, MAO, and KTO substrates. The marked reduction in Hc is considered to arise from the morphology of FePt thin films.