1995
DOI: 10.1016/0039-6028(95)80057-3
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Anomalous behaviors observed in the isothermal desorption of GaAs surface oxides

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Cited by 47 publications
(21 citation statements)
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“…Ga atoms cannot reevaporate from the surface at the growth temperature of InN layers. However, Ga 2 O molecules, which may be formed on the surface by background O atoms during growth, has a considerably high enough vapor pressure to reevaporate from the surface at the growth temperature [6]. A typical absorption spectrum of InN layer grown under the low Ga beam flux irradiation is shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Ga atoms cannot reevaporate from the surface at the growth temperature of InN layers. However, Ga 2 O molecules, which may be formed on the surface by background O atoms during growth, has a considerably high enough vapor pressure to reevaporate from the surface at the growth temperature [6]. A typical absorption spectrum of InN layer grown under the low Ga beam flux irradiation is shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Irradiated Ga atoms during growth cannot re-evaporate from the growth surface of InN layers at the present growth temperature. However molecules such as Ga 2 O and CO 2 have considerable higher vapor pressures enough to reevaporate from the surface even at the present temperatures of $500 1C [6]. The experimental results strongly indicate that oxygen atoms on the growth surface can reevaporate easily by forming of the Ga 2 O and CO 2 molecules instead of oxygen incorpora- tion into the InN layers.…”
Section: Resultsmentioning
confidence: 72%
“…In general, the irradiated Ga and the carbon atoms during the growth cannot re-evaporate from the growth surface of the InN layers at the present growth temperature of 550 °C. However, such as Ga 2 O and CO x molecules seem to be enough highly volatile to re-evaporate from the surface even at the present temperatures about 500 °C [5]. The experimental results strongly indicate that the oxygen atoms on the growth surface can re-evaporate easily by forming of the Ga 2 O molecules instead of the oxygen incorporation into the InN layers.…”
Section: Methodsmentioning
confidence: 84%