2015
DOI: 10.1109/tps.2015.2436973
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Anode Current Density Distribution Measurements for Different Vacuum Arc Modes Subjected to Axial Magnetic Field

Abstract: We report our measurements of anode current density distributions for different modes in vacuum arc discharge using a split-anode and a cup-shaped axial magnetic field cathode configuration system. The modes investigated included the diffuse arc and anode spot. The anode surface was divided into four regions: one central region and three symmetricaldisposed peripheral annular-arc regions. Three different-sized central regions were selected with diameters of 12, 18, and 20 mm. The contact material was CuCr25 (2… Show more

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Cited by 24 publications
(7 citation statements)
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“…The results of the plasma potential along the Z-axis are shown in figure 3(a) under RF powers of 200, 800, 1000, 1200 and 1500 W. The helicon plasma was operated in a capacitively coupled mode (the E-mode at a lower power of 200 W), an inductive coupled mode (H-mode) at a higher power of 800 W, and finally enters wave-coupled mode (W-mode) at high powers of 1000, 1200 and 1500 W, as seen in figure 3(b); details of the mode transition can be found in [30]. In the first mode at low power, the plasma potential data (noted as stars in figure 3(a)) acquired by the RF-compensated probe (RFCP) is also presented for comparison with the current method (noted as open diamonds in figure 3(a)).…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The results of the plasma potential along the Z-axis are shown in figure 3(a) under RF powers of 200, 800, 1000, 1200 and 1500 W. The helicon plasma was operated in a capacitively coupled mode (the E-mode at a lower power of 200 W), an inductive coupled mode (H-mode) at a higher power of 800 W, and finally enters wave-coupled mode (W-mode) at high powers of 1000, 1200 and 1500 W, as seen in figure 3(b); details of the mode transition can be found in [30]. In the first mode at low power, the plasma potential data (noted as stars in figure 3(a)) acquired by the RF-compensated probe (RFCP) is also presented for comparison with the current method (noted as open diamonds in figure 3(a)).…”
Section: Resultsmentioning
confidence: 99%
“…The rate coefficients are the function of the cross-sections and the electron energy distribution function, which are related to the electron temperature and assumed to be a Maxwellian distribution of energies in this paper. The rate coefficients and other parameters are listed in reference [29] and [30]. Here, we selected the argon emission lines 750.39 nm and 811.53 nm.…”
Section: Simple Probe and Oes Diagnosticsmentioning
confidence: 99%
“…Generally, the coupled TG mode and H mode will heat electrons both in the center and in the radial edge, since a TG wave with a short radial wavelength is highly damped near the radial boundary [14], and an H wave with a longer wavelength can reach the center of the plasma [15]. As is well known [16][17][18][19], helicon plasma will undergo three discharge modes, namely the E, H, and W modes, which can be characterized by density jumping, spectral line intensity variation, and intensified chargecoupled device discharge images.…”
Section: Introductionmentioning
confidence: 99%
“…Experimental measurement is usually a direct and best way to obtain information of the helicon plasma. Langmuir RF-compensated probe [14], for example, is a commonly used method to determine the plasma density at low pressure.…”
Section: Introductionmentioning
confidence: 99%