2022 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR) 2022
DOI: 10.1109/cleo-pr62338.2022.10431973
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Annealing Sequence Dependence of Directly Bonded InP/Si Substrate for GaInAsP LDs on Silicon Platform

Liang Zhao,
Motonari Sato,
Kota Shibukawa
et al.
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