Annealing dependence of structural and optical properties of Zr-doped ZnO films deposited by radio frequency magnetron co-sputtering

Sung, Nark‐Eon; Marcus, Matthew A.; Lee, Kug‐Seung; Woo, Han Young; Lee, Ik-Jae

doi:10.1016/j.tsf.2019.137782

Cited by 3 publications

(2 citation statements)

References 54 publications

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“…Thin films (TFs) are considered a type of nanomaterial in which the resulting crystallinity and morphology can be fine‐tuned relatively easily 12,13 . There are many methods to fabricate TFs, for example, thermal evaporation, 14 chemical bath deposition, 15 spray pyrolysis, 16 atomic layer deposition, 17 and radio frequency (RF) magnetron co‐sputtering 18–20 . Among them, RF magnetron co‐sputtering has striking advantage of obtaining uniform TFs at a high deposition rate with precisely controlled elemental compositions 21,22 …”

Section: Introductionmentioning

confidence: 99%

Tailoring the surface properties of molybdenum oxytelluride thin films by its compositional ratio

Han,

Yoon,

Park

et al. 2024

Surface & Interface Analysis

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In this work, RF magnetron co‐sputtering was used to fabricate molybdenum oxytelluride thin films with different atomic ratios. Scanning electron micrographs and atomic force micrographs revealed that pure Mo thin films were segregated. Thin films with 40% Te content portrayed needle‐like structures and thus had the largest Rq value of 2.48 nm. Contact angle measurements further supported the findings as the thin films with 40% Te content were the most hydrophobic. X‐ray photoelectron spectroscopy results revealed that the major oxidation states of Mo from Te‐poor to Te‐rich TFs were changed from high (+6) to low (+4 and/or +2). X‐ray diffraction data showed that peaks pertaining to molybdenum oxide species appeared, notably at 33.048° and 33.115°. Ultraviolet photoelectron spectroscopy and Kelvin probe measurements evinced that the work function increases with increasing Te content. Four‐point probe measurements revealed that molybdenum oxytelluride thin films tend to have higher electrical conductivity than pure Mo and Te thin films.

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Section: Introductionmentioning

confidence: 99%

Tailoring the surface properties of molybdenum oxytelluride thin films by its compositional ratio

Han,

Yoon,

Park

et al. 2024

Surface & Interface Analysis

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“…Furthermore, Zr 4+ (ionic radius of 0.742 Å) and Zn 2+ (ionic radius of 0.745 Å) ions have similar radii and Zr is an n-type doping impurity; thus, it can increase the carrier density in ZnO thin films. (24)(25)(26) Many methods, such as sputtering, pulsed laser deposition (PLD), and the sol-gel method, (27,28) can be used for depositing ZnO thin films. Sputtering is advantageous over the other methods for preparing uniform and large-area films with higher quality.…”

Section: Introductionmentioning

confidence: 99%

Effects of Annealing Temperature on Structural and Optoelectronic Properties of Zr-doped ZnO Thin Films for Photosensors

Yen¹,

Chen²,

Lai³

et al. 2021

Sensors and Materials

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We investigated the effects of the annealing temperature on the optoelectronic properties of Zr-doped ZnO (ZZO) thin films deposited on glass substrates by radio frequency sputtering and annealed at 200, 300, and 400 °C. It was found by X-ray diffraction analysis that all the deposited thin films had a hexagonal crystal structure with polycrystalline grains oriented along the (0 0 2) direction. Furthermore, the film annealed at 400 ℃ had the lowest resistivity among the films due to the growth of grains, as well as the lowest resistivity of 1.5 × 10 −2 Ω•cm, a mobility of 35 cm 2 V −1 s −1 , and a carrier concentration of 4.2 × 10 19 cm −3 . It also had a maximum transmittance of 95% and an energy gap of 3.2 eV. These results show that ZZO thin films subjected to annealing at 400 ℃ are promising for use as stable photosensors.

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Nanostructured ZZO Oxides for TCO Applications: Physical, Dielectric, and Complex Impedance Spectroscopy Analysis

Massoudi

2024

Arab J Sci Eng

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Annealing dependence of structural and optical properties of Zr-doped ZnO films deposited by radio frequency magnetron co-sputtering

Cited by 3 publications

References 54 publications

Tailoring the surface properties of molybdenum oxytelluride thin films by its compositional ratio

Tailoring the surface properties of molybdenum oxytelluride thin films by its compositional ratio

Effects of Annealing Temperature on Structural and Optoelectronic Properties of Zr-doped ZnO Thin Films for Photosensors

Nanostructured ZZO Oxides for TCO Applications: Physical, Dielectric, and Complex Impedance Spectroscopy Analysis

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