1991
DOI: 10.1063/1.106103
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Annealing and profile of interstitial iron in boron-doped silicon

Abstract: Deep level transient spectroscopy and double correlation technique were used to examine the annealing and profiles of interstitial iron in boron-doped silicon at a temperature range from 50 to 400 °C. The results show that iron-boron pairs begin to break-up at a temperature as low as 50 °C. After a short time annealing (5 min) at a temperature up to 400 °C, most of the iron from the breaking is converted into interstitial iron. We also find that the distribution of interstitial iron under the silicon surface i… Show more

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Cited by 19 publications
(9 citation statements)
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“…10 The corresponding paired iron fraction f are between 0.6 at 364 K and 0.15 at 394 K, consistent with the observation, made by Gao et al, 11 0 that appears near this edge, while in the neutral region most of the Fe i was supposed to be paired with boron. However, we found above that, in the investigated temperature range ͑364-394 K͒, the fraction f of paired iron in the neutral region lies between 0.15 and 0.6.…”
Section: ͓S0003-6951͑96͒01613-8͔supporting
confidence: 77%
“…10 The corresponding paired iron fraction f are between 0.6 at 364 K and 0.15 at 394 K, consistent with the observation, made by Gao et al, 11 0 that appears near this edge, while in the neutral region most of the Fe i was supposed to be paired with boron. However, we found above that, in the investigated temperature range ͑364-394 K͒, the fraction f of paired iron in the neutral region lies between 0.15 and 0.6.…”
Section: ͓S0003-6951͑96͒01613-8͔supporting
confidence: 77%
“…However, there are good reasons not to abandon the surface or SiN x film gettering mechanism in bottom samples entirely. Factors in favor include the SIMS data for SiN x samples, the same interstitial iron decay in non-sister samples, and previous studies that have found iron gettering to free surfaces in singlecrystal silicon [32], [33]. Trapping of interstitial iron at crystal defects in mc-Si could slow down the effective diffusion process of interstitial iron, and iron release from elsewhere in the material at 500°C could complicate the kinetics further.…”
Section: Comparison Of Annealed Iodine-ethanol and Silicon Nitridementioning
confidence: 99%
“…Literature values are from Refs. [26][27][28][29][30][31][32] and were originally collated by Ref. [23]; acquisition methods include DLTS, thermally stimulated capacitance (TSCAP, a predecessor technique to DLTS), and Hall effect.…”
Section: Five-parameter Fit Across All Temperaturesmentioning
confidence: 99%