Anisotropic surface properties of micro/nanostructured a-C:H:F thin films with self-assembly applications

Abstract

The singular properties of hydrogenated amorphous carbon (a-C:H) thin films deposited by pulsed DC plasma enhanced chemical vapor deposition (PECVD), such as hardness and wear resistance, make it suitable as protective coating with low surface energy for self-assembly applications. In this paper, we designed fluorine-containing a-C:H (a-C:H:F) nanostructured surfaces and we characterized them for self-assembly applications. Sub-micron patterns were generated on silicon through laser lithography while contact angle measurements, nanotribometer, atomic force microscopy (AFM), and scanning electron microscopy (SEM) were used to characterize the surface. a-C:H:F properties on lithographied surfaces such as hydrophobicity and friction were improved with the proper relative quantity of CH4 and CHF3 during deposition, resulting in ultrahydrophobic samples and low friction coefficients. Furthermore, these properties were enhanced along the direction of the lithography patterns (in-plane anisotropy). Finally, self-assembly properties were tested with silica nanoparticles, which were successfully assembled in linear arrays following the generated patterns. Among the main applications, these surfaces could be suitable as particle filter selector and cell colony substrate.

Rapid Formation of Transparent Superhydrophobic Film on Glasses by He/CH4/C4F8Plasma Deposition at Atmospheric Pressure

“…In order to modify the surface, various methods such as sol‐gel techniques, chemical vapor deposition, and plasma treatments have been widely used . Among them, plasma processes allow preparation of superhydrophobic surfaces using many types of plasma sources such as microwave plasma, inductively coupled plasma (ICP), capacitively coupled plasma (CCP), and atmospheric pressure plasmas.…”

Optical security and authentication using nanoscale and thin-film structures

“…16(c)]. More information about the fabrication procedure of these codes can be found in [45,85,86]. The system is illuminated by means of a LED source in combination with an interferometer filter (λ=535 nm).…”