2021
DOI: 10.1039/d1na00259g
|View full text |Cite
|
Sign up to set email alerts
|

Anisotropic silicon nanowire arrays fabricated by colloidal lithography

Abstract: The combination of metal-assisted chemical etching (MACE) and colloidal lithography allows for the affordable, large-scale and high-throughput synthesis of silicon nanowire (SiNW) arrays. However, many geometric parameters of these arrays...

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

2
21
0

Year Published

2021
2021
2024
2024

Publication Types

Select...
8

Relationship

3
5

Authors

Journals

citations
Cited by 22 publications
(23 citation statements)
references
References 67 publications
(120 reference statements)
2
21
0
Order By: Relevance
“… Summary of our work to structure and pattern VA-SiNW arrays in 3D via colloidal lithography, MACE, and 3DEAL. Modified from refs ( 11 ), ( 33 ), and ( 42 ) (copyright 2017, 2018, 2020, respectively, American Chemical Society), and adapted from ref ( 44 ) (2021, CC BY 3.0). …”
Section: Structuring and Patterning Silicon Nanowires In 3d For Spati...mentioning
confidence: 99%
See 1 more Smart Citation
“… Summary of our work to structure and pattern VA-SiNW arrays in 3D via colloidal lithography, MACE, and 3DEAL. Modified from refs ( 11 ), ( 33 ), and ( 42 ) (copyright 2017, 2018, 2020, respectively, American Chemical Society), and adapted from ref ( 44 ) (2021, CC BY 3.0). …”
Section: Structuring and Patterning Silicon Nanowires In 3d For Spati...mentioning
confidence: 99%
“…(d–f) Elliptical cross-sections: Deposition of the metal layer under an oblique angle results in an elliptical shadowing effect, leading to SiNWs with controllable elliptical morphologies after MACE. Adapted from ref ( 44 ) (2021, CC BY 3.0). Schemes (a, d) and secondary electron SEM images (b, c, e, f).…”
Section: Structuring and Patterning Silicon Nanowires In 3d For Spati...mentioning
confidence: 99%
“…19,20 Furthermore, the interfacial assembly can be transferred onto solid substrates to obtain nanoscale surface patterns with high fidelity over macroscopic areas 21,22 which are exploited in photonic 23,24 or phononic 25,26 applications, or serve as a template for the fabrication of more complex plasmonic nanostructure- 27–29 or nanowire arrays. 26,30–32…”
Section: Introductionmentioning
confidence: 99%
“…Side‐view SEM images were also taken by tilting the samples ≈30° away from the cross‐sectional orientation to better analyze the MPGO morphology. [ 26 ] These images (Figure 2e–h) show that the MPGO had three parts: a GO bottom layer, partially interconnected GO vertical “walls” (of 5–6 µm in height as seen in Figure 2e), and a thin micropore surface morphology located on top of the walls. Other works have reported similar polymer structures emerging from BF fabrication.…”
Section: Resultsmentioning
confidence: 99%