2004
DOI: 10.1023/b:rumi.0000026175.29416.eb
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Anisotropic Etching of SiO2in High-Voltage Gas-Discharge Plasmas

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Cited by 55 publications
(17 citation statements)
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“…Unfortunately, asymptotic methods do not allow us to analyze different methods for manufacturing micro-relief of diffractive optical elements [29][30][31][32][33][34][35][36]. Such a study is necessary to select the most appropriate technology for manufacturing DOEs intended for solving a particular problem.…”
Section: Focusators Researchmentioning
confidence: 99%
“…Unfortunately, asymptotic methods do not allow us to analyze different methods for manufacturing micro-relief of diffractive optical elements [29][30][31][32][33][34][35][36]. Such a study is necessary to select the most appropriate technology for manufacturing DOEs intended for solving a particular problem.…”
Section: Focusators Researchmentioning
confidence: 99%
“…Focusators were investi-gated theoretically and experimentally [32][33][34][35][36][37][38][39][40][41]. New methods for the diffractive microrelief formation were developed to create the focusators [42][43][44][45][46][47][48][49][50][51]. In 1989 focusator in a transverse cut with a high intensity distribution at the edges was successfully tested in the US in the Institute "General Motors" for heat strengthening of steel using 3 kW laser of the company "Spectro-physics".…”
Section: Focusators Of Laser Radiationmentioning
confidence: 99%
“…IPSI RAS has many investigations in counting [23][24][25][26][27][28][29][30][31][32][33][34][35][36] and processing [37][38][39][40][41][42][43][44][45][46][47][48][49][50][51][52][53][54][55] of diffractive optics. IPSI RAS and Laser Center of Hannover have investigated the two photon polymerization technology for processing microdevices such as IOLs [56][57][58].…”
Section: Russian Lensesmentioning
confidence: 99%