2007
DOI: 10.1149/1.2393013
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Anion Effects on Cu–benzotriazole Film Formation

Abstract: We examine the effect of different anions in solutions containing benzotriazole ͑BTA͒ on the Cu removal rate during chemical mechanical planarization ͑CMP͒. In solutions containing both Cl − and BTA, the Cu removal rate is nearly a factor of twenty lower than in solutions containing either Cl − or BTA alone. As-grown BTA films from solutions containing different anions are characterized using atomic force microscopy, ellipsometry, Raman spectroscopy, mass spectrometry, and open-circuit-potential measurements. … Show more

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Cited by 41 publications
(37 citation statements)
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References 65 publications
(113 reference statements)
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“…Subsequent thickening of the inhibiting layer is regarded to occur as Cu + species migrate through the Cu-BTAH layer which are necessary to form the Cu(I)-BTAH coordination polymer [71]. This study explores the application of scanning electrochemical microscopy to study the film formation and the stability of the protective film formed on copper by benzotriazole (BTAH).…”
Section: Introductionmentioning
confidence: 99%
“…Subsequent thickening of the inhibiting layer is regarded to occur as Cu + species migrate through the Cu-BTAH layer which are necessary to form the Cu(I)-BTAH coordination polymer [71]. This study explores the application of scanning electrochemical microscopy to study the film formation and the stability of the protective film formed on copper by benzotriazole (BTAH).…”
Section: Introductionmentioning
confidence: 99%
“…On the one hand, this film [Cu(I)-BTA] is a physical barrier screening the metal surface from the corrosive ions present in solution, and on the other hand, it binds copper atoms, preventing anodic dissolution and decreasing the electrical conductivity of the surface layer [7]. The following reactions [7][8][9][10] …”
Section: Resultsmentioning
confidence: 99%
“…The protective film can be additionally stabilized by incorporation of halide ions (Figure 6), moreover the film thickness increases in this case [7]. In alkaline medium, the copper surface contains oxide-hydroxide compounds (the fraction of which increases with temperature), and BTA -adsorption on oxide-coated metal surface is preferred and occurs sufficiently fast [8], probably due to the ability of oxygen atoms in the oxide (Cu-O-Cu) to form hydrogen bonds with hydrogen atoms of the benzotriazole anion (C-H).…”
Section: Addition Of 1·10mentioning
confidence: 93%