The surface excitation produced by impinging or escaping electrons is a competitive process to elastic backscattering. It affects the intensity of Auger and XPS peaks and is characterized by the surface excitation parameter P se . This appears in the surface loss peak I.E pls /, and possibly a surface plasmon. In our work P se is defined as the ratio of the probability to create a surface plasmon/elastic scattering and is deduced from the integrated surface loss peak and elastic peak, respectively. Our procedure is based on reflection electron energy loss spectroscopy and elastic peak electron spectroscopy spectra and Kl i spectra (K is the inelastic scattering cross-section and l i is the inelastic mean free path), determined using Tougaard's method. The normalized Kl i curves are fitted to the spectrum at E = 5 keV (primary energy) and E L = E pl1 (volume plasmon), approximated with the Lorentzian type three-parameter formula of Tougaard. For E > E pl1 , the normalized curves are overlapping and P se is deduced from the integrated difference spectra fitted with the Tougaard cross-sections. The procedure was applied on materials exhibiting surface and volume plasmons: III-V semiconductors (GaAs, InSb) and In and Sb metals. The REELS experiments were carried out with an ESA 31 HSA spectrometer covering the E = 0.2-5 keV energy range.