Angular Distribution of Sputtered Particles from Ternary Alloy Fe_71.9Cr_5.6Al_22.5 under Kr⁺ Bombardment at Normal Incidence

Abstract

Iron, chromium and aluminum particles sputtered under 5 keV by Kr + ion bombardment at normal incidence from the ternary alloy Fe82Cr6Al12 was simulated. The Stopping and Range of Ions in Matter (SRIM) software combined to a new code-program, called Angulaire, were used to obtain the sputtering yields and angular distributions of the ejected species. The simulation was performed for a large number of incident ions (about 2 × 10 5 ions) and the number of particles emitted in the solid angle corresponding to the probe was counted by a computer. The angular distributions of sputtered particles were compared with the results available in the literature and showed a reasonable agreement. Furthermore, we have demonstrated that the angular distribution of the differential sputtering yields of all ejected species (iron, aluminum, and chromium) from the ternary alloy exhibited an over-cosine tendency.

Angular distribution of particles sputtered from a copper target by 5‐keV Kr ions: Experiment and simulation study

“…Once the calculation is finished, a file containing the ejection angles of all the sputtered atoms is generated and saved automatically. These raw data are then processed by another program, called Angulaire, 25 to find the total number of copper atoms emitted a given direction characterized by the polar ejection angle θ .…”