Angular dependence of the sputtering yield of rough beryllium surfaces

Küstner, M.; Eckstein, W.; Hechtl, E.; Roth, J.

doi:10.1016/s0022-3115(98)00648-5

Cited by 61 publications

(44 citation statements)

References 24 publications

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“…Figures 3 (a)-(c) compare the angular sputtering yield for two surface roughnesses of three ion-target systems: Helium on Beryllium, Deuterium on Beryllium, and Argon on Tungsten respectively. As observed in other simulations and experiments, the peak of maximum sputtering yield shifts to the right [17], [18], [19]. In Fig.…”

Section: Implementation Of Fractal Surface Roughness In F-tridynsupporting

confidence: 87%

“…As a component in a multiscale code, F-TRIDYN will be useful for simulation of the atomic timescale effects of energetic ions on a material, such as erosion, implantation, and backscattering, and will act as the boundary between plasma edge and material bulk codes. [17], [18], [19], namely: reduction in yield for some systems at medium angle of incidence and the shift of the maximum sputtering yield to the right.…”

Section: Discussionmentioning

confidence: 99%

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F-TRIDYN: A Binary Collision Approximation code for simulating ion interactions with rough surfaces

Drobny

Hayes

Curreli

et al. 2017

Journal of Nuclear Materials

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Fractal TRIDYN (F-TRIDYN) is a modified version of the widely used Monte Carlo, Binary Collision Approximation code TRIDYN that includes an explicit model of surface roughness and additional output modes for coupling to plasma edge and material codes. Surface roughness plays an important role in ion irradiation processes such as sputtering; roughness can significantly increase the angle of maximum sputtering and change the maximum observed sputtering yield by a factor of 2 or more. The complete effect of surface roughness on sputtering and other ion irradiation phenomena is not completely understood. Many rough surfaces can be consistently and realistically modeled by fractals, using the fractal dimension and fractal length scale as the sole input parameters. F-TRIDYN includes a robust fractal surface algorithm that is more computationally efficient than those in previous fractal codes and which reproduces available experimental sputtering data from rough surfaces. Fractals provide a compelling path toward a complete and concise understanding of the effect that surface geometry plays on the behavior of plasma-facing materials. F-TRIDYN is a flexible code for simulating ion-solid interactions and coupling to plasma and material codes for multiscale modeling.

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Section: Implementation Of Fractal Surface Roughness In F-tridynsupporting

confidence: 87%

Section: Discussionmentioning

confidence: 99%

F-TRIDYN: A Binary Collision Approximation code for simulating ion interactions with rough surfaces

Drobny

Hayes

Curreli

et al. 2017

Journal of Nuclear Materials

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“…However, surface roughness is prone to increase the sputtering yield up to a factor of 5. There have been a few approaches to predict the sputtering yields of rough surface: Ruzic suggested considering the surface roughness as having a fractal geometry [7]; Kuestner et.al., assumed that the surface can be represented as aggregates of simple surfaces at tilted angles [8,9]. These approaches yield results in reasonable agreement with experiments, but their intrinsic limitations had prevented further development of the models.…”

Section: Introductionmentioning

confidence: 99%

Nano-scale modification of 2D surface structures exposed to 6keV carbon ions: Experiment and modeling

Mutzke

Bizyukov

Schneider

et al. 2011

Nuclear Instruments and Methods in Physics Research Section B:

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In this work, a Si pitch grating with typical lateral dimensions of 200-250 nm was exposed to 6 keV C + ions at normal incidence and at an angle of 42° both parallel and perpendicular to the grating structure. In contrast to volatile and recycling ions (like Ar + or H + ), non-recycling ions are able to modify the surface not only due to sputtering, but also due to implantation of incident ions and the re-deposition of projectile atoms following sputtering or reflection. The targetprojectile combination used in this work is an example of such a system forming a mixed Si-C surface. The interaction between the ion beam and the surface has been studied both experimentally and numerically with the focus on validation of the numerical model of the newly developed SDTrimSP-2D code. SDTrimSP-2D is capable of following the evolution of the Si-C system including ion-surface interactions with 2D micro-and nano-structured surfaces. The SDTrimSP-2D code takes the interdependency of surface morphology, sputtering and implantation into account. The simulated surface morphology has been compared to crosssections of bombarded Si pitch grating obtained by SEM, revealing good agreement between experiment and simulation. The calculations also provide improved insight into the mechanisms of surface modification by sputtering, implantation and material transport by redeposition.Keywords: SDTrimSP-2D, sputtering, implantation, redeposition, surface morphology, local ion-surface interactions. IntroductionSputtering of a surface exposed to a flux of energetic ions is one of the most studied effects of ion-surface interactions [1]. However, the details of ion-surface interactions depend greatly on the target-projectile combination. In cases where the projectile is an ion of a volatile (recycling) element, sputtering is usually the dominant process and the surface is eroded. In such cases, experiments are well described theoretically, at least for relatively smooth surfaces. The sputtering yield is the main parameter, which has been used to validate theoretical models with experiments. Existing models like the TRIM code show good agreement with experiment for many target-projectile combinations.

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“…This is because for a rough surface and a given fixed macroscopic incidence angle, on the microscopic level, which is seen by the impinging particles, a broad range of incidence angles occur at the same time. Furthermore, on a rough surface, the sputtering yield is lower than that of a flat surface due to the re-deposition of sputtered products ( Küstner et al, 1999;Loeffler et al, 2009 ). We estimate that the sputtering yields at an 83 °macroscopic angle of incidence, as used in our setup, correspond approximately to the sputtering yields from a flat surface at an ∼60 °angle of incidence ( Küstner et al, 1999 ).…”

Section: Ena Yieldmentioning

confidence: 86%

“…Furthermore, on a rough surface, the sputtering yield is lower than that of a flat surface due to the re-deposition of sputtered products ( Küstner et al, 1999;Loeffler et al, 2009 ). We estimate that the sputtering yields at an 83 °macroscopic angle of incidence, as used in our setup, correspond approximately to the sputtering yields from a flat surface at an ∼60 °angle of incidence ( Küstner et al, 1999 ). Including this correction for the incident angle, our measurements are compatible with the model of Famá et al (2008) , as discussed below, despite the ice temperature of 150 K being outside the parameter range this model was made for ( T < 140 K).…”

Section: Ena Yieldmentioning

confidence: 99%

Emission of energetic neutral atoms from water ice under Ganymede surface-like conditions

Wieser

Futaana

Barabash

et al. 2016

Icarus

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a b s t r a c tThe co-rotating plasma around Jupiter precipitates on the surfaces of the jovian moons, where it is not hindered by a local magnetic field. Precipitating ions lead to the emission of energetic neutral atoms, which are produced via backscattering and sputtering processes, from the surface. The European Space Agency's JUICE mission to Jupiter carries as part of the Particle Environment Package experiment an imaging energetic neutral atom spectrometer called the jovian Neutrals Analyzer (JNA). When it is in orbit around Ganymede, JNA will measure the energetic neutral atom flux emitted from the surface of Ganymede in the energy range from 10 eV to 3300 eV. The surface of Ganymede consists of a large fraction of water ice. To characterize the expected energetic neutral atom fluxes from water ice due to precipitating jovian plasma, we impacted protons and singly charged oxygen ions with energies up to 33 keV on a salty water ice target kept at Ganymede surface conditions. Emitted energetic atoms were measured energy-and mass-resolved using the JNA prototype instrument. The data show high yields for energetic neutral atoms per incident ion in the JNA energy range. For incident protons, energetic neutral atom yields between 0.28 at 1 keV and ∼40 at 33 keV were observed. For incident singly charged oxygen ions, the observed energetic neutral atom yield ranged from 0.8 for at 3 keV to ∼170 at 23 keV.

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Angular dependence of the sputtering yield of rough beryllium surfaces

Cited by 61 publications

References 24 publications

F-TRIDYN: A Binary Collision Approximation code for simulating ion interactions with rough surfaces

F-TRIDYN: A Binary Collision Approximation code for simulating ion interactions with rough surfaces

Nano-scale modification of 2D surface structures exposed to 6keV carbon ions: Experiment and modeling

Emission of energetic neutral atoms from water ice under Ganymede surface-like conditions

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