2016
DOI: 10.1063/1.4943072
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Angle-resolved diffraction grating biosensor based on porous silicon

Abstract: In this study, an optical biosensor based on a porous silicon composite structure was fabricated using a simple method. This structure consists of a thin, porous silicon surface diffraction grating and a one-dimensional porous silicon photonic crystal. An angle-resolved diffraction efficiency spectrum was obtained by measuring the diffraction efficiency at a range of incident angles. The angle-resolved diffraction efficiency of the 2nd and 3rd orders was studied experimentally and theoretically. The device was… Show more

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Cited by 15 publications
(14 citation statements)
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“…This principle has previously been used for displacement sensing in micromechanics, [11][12][13] for chemical sensing, [14][15][16][17] and for biosensing. [18][19][20] In chemical and biological sensing, many powerful device concepts have been proposed based on micropatterning capture molecules or hydrogels into stimulus-responsive phase gratings. 18,21 Binding of target molecules or swelling of the hydrogel alters the wavefront of a laser passing through the element, and this can be read out via a consequent change of the diffraction pattern in the farfield.…”
Section: Introductionmentioning
confidence: 99%
“…This principle has previously been used for displacement sensing in micromechanics, [11][12][13] for chemical sensing, [14][15][16][17] and for biosensing. [18][19][20] In chemical and biological sensing, many powerful device concepts have been proposed based on micropatterning capture molecules or hydrogels into stimulus-responsive phase gratings. 18,21 Binding of target molecules or swelling of the hydrogel alters the wavefront of a laser passing through the element, and this can be read out via a consequent change of the diffraction pattern in the farfield.…”
Section: Introductionmentioning
confidence: 99%
“…Starting from 15 mm features of the master, patterns as small as 750 nm were fabricated. We applied this new capability to fabricate patterns in a silicon wafer that can be used as a functional substrate for many applications such as diffraction grating based sensors 14,15 or as a master template for so lithography applications. 16,17…”
Section: Introductionmentioning
confidence: 99%
“…Optical grating sensors have been reported for measuring a variety of analytes including pH, lead ions, thrombin, and viruses . The basic principle of operation of the grating sensors is the modulation of the intensity of light transmitted in a specified direction as a result of a change in the geometrical dimensions, absorption, and/ or refractive index of the alternating strips caused by analytes . The specificity is achieved by incorporating analyte‐sensitive moieties (or ligands) in the material used to make the alternating strips of the gratings.…”
Section: Introductionmentioning
confidence: 99%
“…Amplitude grating sensors are commonly fabricated using soft lithography where a precursor solution of the hydrogel with absorbing analyte‐sensitive indicator is patterned using an elastomer stamp 5b,8. Alternatively, a continuous film of photosensitive hydrogel is spatially patterned by selective photodegradation using light .…”
Section: Introductionmentioning
confidence: 99%