Anchor Loss in Hemispherical Shell Resonators

Darvishian, Ali; Shiari, Behrouz; Cho, Jae Yoong; Nagourney, Tal; Najafi, K.

doi:10.1109/jmems.2016.2636080

Cited by 61 publications

(53 citation statements)

References 48 publications

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“…However, MEMS gyroscopes have yet to satisfy the navigation-grade requirements needed for highprecision applications such as an inertial measurement unit for GPS-augmented navigation, unmanned surveillance vehicles, and aircraft and personal positioning systems [4][5][6]. A variety of means have been proposed to improve the accuracy of MEMS gyroscopes, such as array gyroscopes with multimasses [7], 3-D fabrication techniques with high-aspect ratio and effective volume utilization [8], digital control method based on ΔΣ technology [9], and mode-matching technology [1]. Mode-matching technology is widely concerned and becomes one of the most promising approaches to improve the accuracy of MEMS gyroscopes.…”

Section: Introductionmentioning

confidence: 99%

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A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope

Yang

et al. 2019

Journal of Sensors

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A digital mode-matching control system based on feedback calibration, where two pilot tones are applied to actuate the sense mode by the robust feedback controller, is presented for a MEMS gyroscope in this paper. A dual-mass decoupled MEMS gyroscope with the integrated electrostatic frequency tuning mechanisms, the quadrature correction electrode, and the feedback electrode is adopted to implement mode-matching control. Compared with the previous mode-matching method of forward excitation calibration, the proposed mode-matching scheme based on feedback calibration has better adaptability to the variation in the frequency of calibration pilot tones and the quality factor of the sense mode. The influences of calibration pilot tone frequency and the amplitude ratio on tuning performance are studied in theory and simulation. The simulation results demonstrate that the tuning error due to the amplitude asymmetry of the sense mode increases with a frequency split between pilot tones and the drive mode and is significantly reduced by the amplitude correction technology of pilot tones. In addition, the influence of key parameters on the stability of the mode-matching system is deduced by using the average analysis method. The MATLAB simulation of the mode-matching control system illustrates that simulation results have a good consistency with theoretical analysis, which verifies the effectiveness of the closed-loop mode-matching control system. The entire mode-matching control system based on a FPGA device is implemented combined with a closed-loop self-excitation drive, closed-loop force feedback control, and quadrature error correction control. Experimental results demonstrate that the mode-matching prototype has a bias instability of 0.63°/h and ARW of 0.0056°/h1/2. Compared with the mode-mismatched MEMS gyroscope, the performances of bias instability and ARW are improved by 3.81 times and 4.20 times, respectively.

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Section: Introductionmentioning

confidence: 99%

“…Amplitude Ratio of Calibration PilotTones. Different frequency splits between calibration pilot tones and drive mode result in different zero crossing points, which means how much the tuning voltage can reach in the closed-loop control system.According to equation(8), the zero crossing points refer to A 1 a 1 cos φ 1 + A 2 a 2 cos φ 2 = 0, 11…”

mentioning

confidence: 99%

A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope

Yang

et al. 2019

Journal of Sensors

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“…A significant amount of research has been carried out on the different kinds of micromachined gyroscopes over the past decades, which has directly promoted the development of high performance gyroscopes for various applications. Among the different kinds of MEMS gyroscopes, the typical structures include turning forks (TFG) [4][5][6][7][8], combs [9][10][11], rings or disks [12][13][14][15], or micro wineglass [16][17][18].…”

Section: Introductionmentioning

confidence: 99%

A Tuning Fork Gyroscope with a Polygon-Shaped Vibration Beam

Hou

Kuang

et al. 2019

Micromachines

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In this paper, a tuning fork gyroscope with a polygon-shaped vibration beam is proposed. The vibration structure of the gyroscope consists of a polygon-shaped vibration beam, two supporting beams, and four vibration masts. The spindle azimuth of the vibration beam is critical for performance improvement. As the spindle azimuth increases, the proposed vibration structure generates more driving amplitude and reduces the initial capacitance gap, so as to improve the signal-to-noise ratio (SNR) of the gyroscope. However, after taking the driving amplitude and the driving voltage into consideration comprehensively, the optimized spindle azimuth of the vibration beam is designed in an appropriate range. Then, both wet etching and dry etching processes are applied to its manufacture. After that, the fabricated gyroscope is packaged in a vacuum ceramic tube after bonding. Combining automatic gain control and weak capacitance detection technology, the closed-loop control circuit of the drive mode is implemented, and high precision output circuit is achieved for the gyroscope. Finally, the proposed Micro Electro Mechanical Systems (MEMS) gyroscope system demonstrates a bias instability of 0.589°/h, an angular random walk (ARW) of 0.038°/√h, and a bandwidth of greater than 100 Hz in a full scale range of ± 200°/s at room temperature.

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“…Many mechanisms have been found to contribute to the overall damping of the MEMS resonators. Some well-known damping mechanisms include: air damping [ 12 , 13 ], surface loss [ 14 , 15 ], clamping loss [ 16 , 17 ], and thermoelastic dissipation (TED) [ 18 , 19 ]. Different kinds of dissipation mechanisms are treated as paralleling dampers, and the overall Q is determined by Q −1 = ∑ Q i −1 , where i labels the different mechanisms.…”

Section: Introductionmentioning

confidence: 99%

Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

Zhou

Xiao

et al. 2018

Micromachines

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Quality factor is one of the most important parameters for a MEMS resonator. Most MEMS resonators are dominated by thermoelastic dissipation (TED). This paper demonstrates that the TED in a disk resonator that is made of (111) single-crystal silicon is surpassed by clamping loss. The stiffness-mass decoupling design method, combined with reducing the beam width, was used to engineer high QTED. Experiments show that Q of the (111) disk resonator have an upper boundary that is determined by the clamping loss caused by the unbalanced out-of-plane displacement. The origin of the out-of-plane displacement is explained by theory and simulation.

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Anchor Loss in Hemispherical Shell Resonators

Cited by 61 publications

References 48 publications

A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope

A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope

A Tuning Fork Gyroscope with a Polygon-Shaped Vibration Beam

Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

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