Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator

Vukasin, Gabrielle D.; Sanchez, Veronica K.; Glaze, Janna; Bousse, Nicholas E.; Bissel, Nathan; Shin, Dongsuk D.; Kwon, Hyun-Keun; Heinz, David B.; Yen, Ernest Ting-Ta; Kenny, Thomas W.

doi:10.1109/jmems.2020.3012925

Cited by 10 publications

(11 citation statements)

References 31 publications

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“…This square plate resonator is limited by clamping loss, as was previously determined through measurements of quality factor for this geometry over the temperature range from 110 K to 300 K [32]. Separate finite element simulations predict Q T E D to be greater than 10 8 .…”

Section: Bulk-mode Resonator Measurementsmentioning

confidence: 62%

“…Surface loss is believed to be negligible for these devices because of the hermetic vacuum encapsulation, as well as the relatively low surfaceto-volume ratio compared to the nanomechanical resonators for which surface loss is prominent [80]. Akhiezer-limited Q is routinely reached in silicon encapsulated bulk-mode micromechanical resonators that attain resonance-frequencyquality-factor products >10 13 [32], [81], [82]. The measured products in Figs.…”

Section: Temperature Studymentioning

confidence: 99%

“…If clamping loss is a limiting dissipation mechanism in a MEM/NEM resonator, modifying the boundary conditions of the chip with the frame can substantially improve the post-fabrication Q. For many applications, clamping loss can be minimized at the anchors through symmetric anchors [18], compliant tethers [26], [29], [32], or soft-clamping [41], [43]. For the resonator designs that are often limited by clamping loss, modifying the chip boundary conditions as is demonstrated in this work can be used to improve Q.…”

Section: Bulk-mode Resonator Measurementsmentioning

confidence: 99%

“…The out-of-phase mode of the two vibrating elements in a DETF have zero net force and moment at the supports, which results in a significantly higher Q value than a corresponding cantilever of similar dimensions due to reduced clamping loss [18]. More recent innovations for reducing clamping loss include engineering the tether geometry [19]- [32] and integrating phononic crystals into the resonator or anchors [33]- [53].…”

Section: Introductionmentioning

confidence: 99%

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Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators

Miller

Vukasin

Zhang

et al. 2022

J. Microelectromech. Syst.

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Clamping loss in micromechanical resonators can strongly depend on the boundary conditions far away from the actual vibrating structure because the acoustic wavelength greatly exceeds the device dimensions. We demonstrate a scheme for post-fabrication tuning of the clamping loss in flexural-mode and bulk-mode resonators by modifying the boundary conditions of the chip with the frame. The measured quality factor increases by more than an order-of-magnitude for the microcantilevers and more than a factor of three for the bulk-mode resonators when frame contact is minimized via suspension of the chip by wirebonds. We propose a two-degree-of-freedom fluctuationdissipation model to describe the thermomechanical noise and forced response in the presence of this tunable anchor damping. By studying the thermomechanical displacement spectrum with tunable clamping loss, we show that variable clamping loss tunes the mechanical quality factor, modifying both the resonator transfer function and thermomechanical noise force. We delineate the dependence of the tunable clamping loss mechanism on microcantilever beam length and ambient temperature from 300 K down to 40 K, and observe potential temperature dependence to clamping loss with reducing temperature.[2021-0141]

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Section: Bulk-mode Resonator Measurementsmentioning

confidence: 62%

Section: Temperature Studymentioning

confidence: 99%

Section: Bulk-mode Resonator Measurementsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators

Miller

Vukasin

Zhang

et al. 2022

J. Microelectromech. Syst.

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“…It is not possible to achieve self-alignment in the piezoelectric domain to realize any resonant mode other than the radial mode depicted in Figure 1b. Therefore, even if piezoelectric transduction is accepted to provide more robust integration and efficient coupling compared to electrostatic transduction of BAW modes, in recent works it has been reported that microfabrication advancements allowed comparable performance of BAW gyroscopes and timing references for electrostatically actuated BAW modes 9,[12][13][14][15] . As electrostatic transduction is achieved through normal forces, shear displacement required to achieve tangential mode is not possible to excite using electrostatics.…”

Section: Introductionmentioning

confidence: 99%

Self-Aligned Single-Electrode Actuation of Tangential and Wineglass Modes using PMN-PT

Erturk¹,

Park²,

Lee³

et al. 2022

Preprint

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Considering evolution of rotation sensing and timing applications realized in Micro-electromechanical systems (MEMS), flexural mode resonant shapes are outperformed by bulk acoustic wave (BAW) counterparts by achieving higher frequencies with both electrostatic and piezoelectric transduction. Within the 1-30 MHz range, which hosts BAW gyroscopes and timing references, piezoelectric and electrostatic MEMS have similar transduction efficiency.Although, when designed intelligently, electrostatic transduction allows self-alignment between electrodes and the resonator for various BAW modes, misalignment is inevitable regarding piezoelectric transduction of BAW modes that require electrode patterning. In this paper transverse piezoelectric actuation of [011] oriented single crystal lead magnesium niobate-lead titanate (PMN-PT) thin film disks is shown to excite the tangential mode and family of elliptical compound resonant modes, utilizing a self-aligned and unpatterned electrode that spans the entire disk surface. The resonant mode coupling is achieved employing a unique property of [011] PMN-PT, where the in-plane piezoelectric coefficients have opposite sign. Fabricating 1-port disk transducers, RF reflection measurements are performed that demonstrate the compound mode family shapes in 1-30 MHz range. Independent verification of mode transduction is achieved using in-plane displacement measurements with Polytec's Laser Doppler Vibrometer (LDV). While tangential mode achieves 40 o /sec dithering rate at 335 kHz resonant frequency, the n=2 wine-glass mode achieves 11.46 nm tip displacement at

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Q-enhancement of piezoelectric micro-oven controlled MEMS resonators using honeycomb lattice phononic crystals

Xiao,

Zhu,

Han

et al. 2024

Chip

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Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator

Cited by 10 publications

References 31 publications

Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators

Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators

Self-Aligned Single-Electrode Actuation of Tangential and Wineglass Modes using PMN-PT

Q-enhancement of piezoelectric micro-oven controlled MEMS resonators using honeycomb lattice phononic crystals

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