We report a new facile approach to achieve highly conformal thin layers (∼10 nm) of anatase TiO 2 on nonfunctionalized carbon nanotubes (CNTs) using atomic layer deposition (ALD). The method adopts an initial deposition of amorphous TiO 2 at a low temperature of 60 °C to ensure a good conformity followed by postdeposition annealing at 450 °C under vacuum to induce a complete phase transformation to crystalline anatase TiO 2 while retaining the structural integrity of the CNTs. This approach yields unprecedented sizes of monocrystalline anatase shell domains of up to 500 nm along the CNTs. The high quality of the anatase layer is evidenced directly by high-resolution transmission electron microscopy, Raman spectroscopy, and X-ray photoelectron spectroscopy. Atomic-scale study of the nanostructure crosssection using electron energy loss spectroscopy provides direct evidence that bonding is formed at the interface after annealing. The low grain boundary anatase shell layer with a well-bonded interface to the CNTs has a high potential of significantly enhanced performance in photocatalysis, solar energy, and nanoelectronics.