Abstract:Optical microswitches are being developed for use in communication and security systems because of their small size and fast response time. However, as the intensity of the light incident on the microswitches increases, the thermal and mechanical responses of the reflective surfaces are becoming a concern. It is important to dissipate heat adequately and to minimize any deformation on the reflective surfaces. To understand the mechanical responses of these microswitches, a set of microstructures have been fabr… Show more
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