Analytically assisted FEM approach for the design and optimization of laterally excited bulk acoustic wave resonators (XBARs) with a high electromechanical coupling

Kumar, Ajay; Prajesh, Rahul

doi:10.1007/s00339-024-07434-6

Appl. Phys. A

2024

DOI: 10.1007/s00339-024-07434-6

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Analytically assisted FEM approach for the design and optimization of laterally excited bulk acoustic wave resonators (XBARs) with a high electromechanical coupling

Ajay Kumar,

Rahul Prajesh

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Analytically assisted FEM approach for the design and optimization of laterally excited bulk acoustic wave resonators (XBARs) with a high electromechanical coupling

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References 26 publications

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