Analytical performance of pulsed radiofrequency glow discharge optical emission spectrometry for bulk and in-depth profile analysis of conductors and insulators

Abstract

PAPER Sanz-Medel et al. Analytical performance of pulsed radiofrequency glow discharge optical emission spectrometry for bulk and in-depth profi le analysis of conductors and insulators

Atomic Spectroscopy

“…The Oviedo group was particularly active in the last 2.5 years, especially in their research on pulsed rf GDs, either coupled to TOF-MS − or OES. − A number of review papers from this group was published in recent years. − In ref they gave an overview on inorganic mass spectrometry techniques used for the characterization at the nanoscale. Two main groups of techniques were reviewed, i.e., on the one hand the techniques used for the analysis of liquids and on the other hand those allowing direct solid analysis with spatial resolution capabilities, i.e., lateral (imaging) and/or in-depth, including GDMS.…”

“…Besides pulsed rf GD-TOF-MS, the potential of pulsed rf GD-OES was also investigated by the same group, for the bulk and quantitative depth profiling analysis of various conductive and nonconductive coatings. − In ref , thin film solar cells based on a-Si:H thin films were characterized. Quantitative depth profiles obtained by either pulsed or continuous mode were compared, and the effects of different pulse conditions, such as pulse frequency, duty cycle, and power, as well as the optimum conditions for both continuous and pulsed rf GD-OES, were reported.…”

“…In ref , a simple multimatrix calibration procedure for pulsed rf GD-OES was described and validated by analyzing conductive layers of thicknesses varying from a few tens of nanometers up to 20 μm and a range of different compositions. In ref , pulsed rf GD-OES was applied for the bulk and depth profiling analysis of conductors and insulators, and a critical comparison of the practical analytical performance characteristics of rf GD-OES in continuous and pulsed modes was made. More specifically, crater shapes, sputtering rates, and emission yields were investigated, demonstrating that enhanced emission yields could be obtained in the pulsed mode, when using small pulse widths.…”

Atomic spectrometry update. Advances in atomic spectrometry and related techniques

“…Alberts et al 123 have attempted to assess the analytical performance of pulsed rf-GD-OES. Rf-GD is generally operated in continuous mode, but the interest in pulsed rf-GD) is steadily increasing.…”

“…Rf-GD is generally operated in continuous mode, but the interest in pulsed rf-GD) is steadily increasing. Alberts et al 123 have attempted to assess the analytical performance of pulsed rf-GD-OES. The technique was carefully evaluated for the analysis of three conducting materials with different matrices (copper, steel and aluminium) and for bulk homogeneous non-coated glasses of varying thicknesses (1, 1.8 and 2.8 mm).…”