Analytical modelling of temperature distribution in resistive thin-film thermal sensors

Козлов, А. Г.

doi:10.1016/j.ijthermalsci.2005.04.009

Cited by 7 publications

(3 citation statements)

References 10 publications

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“…The loss power P lCPW is related to the input frequency and the structure parameters of the power sensor. Loss coefficient α can be expressed by the following factors and equations according to [15].…”

Section: Methodsmentioning

confidence: 99%

“…Many analytical models have been presented for thermoelectric power sensors. The works of Kozlov [12][13][14][15] deal with the Fourier equations of the heat transfer problem considering identical outputs by different thermocouples. Besides, analytical methods for a MEMS thermoelectric power sensor working at X-band have also been presented by our group for steady-state temperature prediction [9,10].…”

Section: Introductionmentioning

confidence: 99%

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Analytical and electrical modeling of a MEMS thermoelectric microwave power sensor

Han

Liao

2016

J. Micromech. Microeng.

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A new analytical method which can support full computer-aided circuit design for a microelectromechanical (MEMS) thermoelectric microwave power sensor operable at X-band is presented in this paper. A reduced dimensional form of a heat transfer equation is built in the radial direction based on point heat source approximation and precise volume mesh of the sensor. Frequency dependent losses are discussed to explain the sensitivity degradation with frequency. Based on this analysis, an electrical model for the power sensor is established. This approach facilitates the modeling of the coupled energy domains in the power sensor straightforwardly by means of a computer-aided simulation. Better estimation property is obtained compared to our previous works. Verifications are both conducted through ANSYS simulation and measurements with close agreements are observed. Relative errors between them are smaller than 13%. The deviations are discussed in detail. Fabrication of the thermoelectric power sensor is based on MEMS technology and the GaAs MMIC process.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Analytical and electrical modeling of a MEMS thermoelectric microwave power sensor

Han

Liao

2016

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…We focus now on the analysis of the influence of some physical parameters on the overheating temperature [18] ∆T = T h − T 1 = δT h − δT 1 , rather than on the inverse analysis in the case of self-heating, study that is very similar to the previous one.…”

Section: Mixed Boundary Conditionsmentioning

confidence: 99%