Analytical modelling of sputter induced surface morphology

Carter, G.; Colligon, J.S.; Nobes, M. J.

doi:10.1080/00337577708234784

Cited by 100 publications

(20 citation statements)

References 30 publications

(6 reference statements)

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“…Note that the vertical scale is enhanced in Fig. 10 and that these cones are much flatter than those seen by Navinsek 36 and Carter et al 37 Even in the case of Ag, individual cones only represent <1% of the crater volume. The crater volume measurements lead directly to values of the sputtering yield at 45°, as shown in Fig.…”

Section: New Experimental Methods For Measuring Sputtering Yieldsmentioning

confidence: 81%

“…In Table 5 we show the values of Y/Y 1 for these and the other four elements based on the data of Table 4 and Eqn. (37) for the extra factor required to account for polyatomic cluster sputtering. The works cited earlier, 58,59 which do not include data for Sb, Te and Bi, show a primary ion energy dependence correlated to the polyatomic yields, indicative of a recombination mechanism 59 where the polyatomics are formed from sputtered atoms that coalesce just above the surface.…”

Section: Angular Dependence Of Sputtering Yieldsmentioning

confidence: 99%

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An accurate semi‐empirical equation for sputtering yields I: for argon ions

Seah¹,

Clifford²,

Green³

et al. 2005

Surface & Interface Analysis

117

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An analysis has been made of the historical data for argon ion sputtering yields of 28 mono-elemental solids in the energy range 250-10 000 eV to develop an improved semi-empirical formula based on Matsunami et al.'s and Yamamura and Tawara's formulations. The best result is found if an essential component involving the target density is included in Matsunami et al.'s approach. The scatter between the predictions and the experimental data is reduced to 9.0% by generating an analytical expression for the term Q that requires none of the target-specific numbers from special look-up tables of the type used by Matsunami et al. and Yamamura and Tawara. For elements other than the 34 elements for which Q values are tabulated, the new Q values range up to a factor of 5 from the default value that they recommend.The predictions are tested by a new method for determining sputtering yields using atomic force microscopy to measure very small crater volumes sputtered in ultrahigh vacuum. Here, 26 mono-elemental targets were studied using a 5 keV argon ion beam set at 45• to the surface normal. The effect of the angle of incidence is evaluated best using Yamamura et al.'s angular equations for this contribution. Results for Sb, Te and Bi indicate a significantly higher sputtering yield than expected. This is thought to arise from the high content of polyatomic groups associated with the low sublimation energies for such clusters in the pure elements of groups V-B and VI-B of the Periodic

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Section: New Experimental Methods For Measuring Sputtering Yieldsmentioning

confidence: 81%

Section: Angular Dependence Of Sputtering Yieldsmentioning

confidence: 99%

An accurate semi‐empirical equation for sputtering yields I: for argon ions

Seah¹,

Clifford²,

Green³

et al. 2005

Surface & Interface Analysis

117

View full text Add to dashboard Cite

show abstract

“…Equation (7) was also derived in [12] when ψ = 0 and an equivalent expression by Budil and Hobler [16].…”

Section: The Modelmentioning

confidence: 99%

“…In the first equation the partial differential with respect to t means at constant x, whereas in the second equation y is kept constant. These equations have been intensively investigated for the case ψ = 0 [12,13,14,15] but in the case of ripple formation ψ = 0. The equations are of a form first investigated by Lagrange [22] and in the 1950's a similar set was used by Lighthill and Whitham [23] to model the flow of traffic.…”

Section: The Modelmentioning

confidence: 99%

“…If the primary effect of incidence angle dependence only is taken into account, then work in the 1970s and 1980s [12,13,14,15] showed that although cones and edges can form on surfaces subjected to normal incidence ion beams, the surfaces would ultimately flatten due to the sides of the cones eroding at a faster rate than the surrounding flat surface. This is in direct contradiction to the Sigmund's micro-roughening argument.…”

Section: Introductionmentioning

confidence: 99%

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Ripple structures on ion bombarded surfaces arising from the sputter yield dependence on incidence angle

Smith

2015

Nuclear Instruments and Methods in Physics Research Section B:

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It is shown that ripple structures on oblique incidence ion bombarded surfaces can be stable features under ion erosion without the necessity to invoke mass redistribution, surface diffusion or micro-roughening due to surface curvature dependent energy deposition. Instead the patterns are predicted to be a natural consequence of non-linear effects due to the dependence of the sputtering yield on the angle of incidence.

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Cross-sectional sample preparation by focused ion beam: A review of ion-sample interaction

Ishitani

Yaguchi

1996

Microsc. Res. Tech.

110

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A focused ion beam (FIB) was applied for cross‐sectional sample preparation with both transmission electron microscopes (TEM) and scanning electron microscopes (SEM). The FIB sample preparation has the advantage of high positioning accuracy for cross sections. On the other hand, a broad ion beam (BIB) has been conventionally used for thinning TEM samples. Although both FIB and BIB use energetic ion beams, they are essentially different from each other in many aspects such as beam size, beam current density, incident angle of the beam with respect to cross sections, and beam scanning (i.e., dynamic or static beam). In this study, FIB cross‐sectioning is compared with BIB thinning. We review inherent characteristics such as positioning accuracy and uniformity of cross section, radiation damage, and beam heating. Discussion is held from a viewpoint of ion beam and sample interaction. © 1996 Wiley‐Liss, Inc.

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Analytical modelling of sputter induced surface morphology

Cited by 100 publications

References 30 publications

An accurate semi‐empirical equation for sputtering yields I: for argon ions

An accurate semi‐empirical equation for sputtering yields I: for argon ions

Ripple structures on ion bombarded surfaces arising from the sputter yield dependence on incidence angle

Cross-sectional sample preparation by focused ion beam: A review of ion-sample interaction

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