Analytical modeling of mechanical behavior for MEMS/NEMS-based single-clamped multilayer resonators with symmetrical complex shapes

Martínez-Cisneros, Eustaquio; Velosa-Moncada, Luis A.; Elvira-Hernández, Ernesto A.; González-Esparza, Daniel; Aguilera-Cortés, Luz Antonio; López-Huerta, Francisco; Herrera-May, Agustín L.

doi:10.1007/s00542-020-05030-1

Cited by 4 publications

(3 citation statements)

References 44 publications

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“…Penelitian untuk meningkatkan performa akselerometer melalui investigasi mekanisme penginderaan baru juga telah dilakukan melalui pendekatan peningkatan berbasis osilator yang disinkronkan untuk meningkatkan resolusi sebanyak 5x lipat dari akselerometer resonansi mikroelektromekanis [9]. Resonator MEMS juga diaplikasikan untuk penginderaan massa contohnya dengan menggunakan struktur mikrokantilever yang digerakkan secara piezoelektrik [10,11], struktur kopel kantilevel yang diaktuasi secara elektrostatik [12], struktur jepit tunggal (single-clamped) [13], dan struktur jepit dobel (clamped-clamped) [14]. Pada penelitian ini, resonator MEMS akan didesain untuk penginderaan massa dengan menggunakan struktur free-free beam.…”

Section: Pendahuluanunclassified

Desain sensor massa resonator MEMS menggunakan struktur free-free beam

Sari

2021

Angkasa

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MEMS (micro-electromechanical systems) is an integrated electro-mechanical device which the technology has been applied to various applications, one of which is for the fabrication of microsensors, such accelerometers, microsensors for flow sensing, pressure sensing and mass sensing. In the MEMS implementation, there are several approaches and structures that can be used. This study designed a MEMS resonator mass sensor by the means of a mechanical resonator approach with free-free beam structure and actuated electrostatically. The design is expected to produce a MEMS based mass sensor with a high performance.

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Section: Pendahuluanunclassified

Desain sensor massa resonator MEMS menggunakan struktur free-free beam

Sari

2021

Angkasa

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“…Furthermore, this model can not be applied to resonators with variable shapes and different fixed supports. Recently, Eustaquio-Martínez et al [35] established an analytical modeling of the first bending resonant frequency and out-ofplane displacements for single-clamped multilayered structures. This modeling is restrained to multilayered resonators with symmetrical complex cross-sections, and it can not be used in resonators with irregular geometrical shapes and with several fixed supports.…”

Section: Introductionmentioning

confidence: 99%

Analytical Modeling of the Mechanical Behavior of MEMS/NEMS-Multilayered Resonators With Variable Cross-Sections for Sensors and Energy Harvesters

et al. 2021

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Resonators based on micro and nanoelectromechanical systems (MEMS/NEMS) are used in many applications, including biological and gas sensors, magnetic field sensors, RF switches, accelerometers, piezoelectric micro and nanogenerators, and viscosity sensors. The design of these resonators requires analytical models to predict their mechanical behavior and optimize the sensitivity and resolution. However, most of these models are only applied to resonators with rectangular and uniform cross-sections. In this paper, we present the analytical modeling to determine the first bending resonant frequency, out-of-plane deflections, and normal stresses of MEMS/NEMS-based multilayered resonators with variable cross-sections and multiple fixed supports. The proposed modeling is derived using the well-known Rayleigh and Macaulay methods, as well as the Euler-Bernoulli beam theory. This analytical modeling is applied to four multilayered resonators with different clamped supports and non-uniform cross-sections. The results of our analytical modeling agree well with respect to those of finite element method (FEM) models and experimental data reported in the literature. The proposed analytical modeling can be used to estimate the frequency shift of resonators due to variations of their geometric parameters, number of clamped-supports or mechanical properties of the materials. Furthermore, this modeling can be used to obtain optimal designs of resonators that ensure safe operations and enhanced performance for sensors and energy harvesters in telecommunications, automotive sector, aerospace industry, consumer electronics, non-destructive testing, and navigation.

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“…By finding the resonant frequencies of the microcantilever to use them as measurement parameters, the simulation investigates the effect of the added mass on changes in resonant frequencies. PMCs can be used not only in a single-layer configuration but also in a twolayer one [30][31][32][33]. In such cases, one piezoelectric layer can use as the actuator, while the other can be used for measurement.…”

Section: Introductionmentioning

confidence: 99%

Vibration and sensitivity analysis of double-layered non-uniform piezoelectric microcantilever as a self-sensing mass sensor

Ghaderi¹,

Dehkordi²,

Fard³

2021

Phys. Scr.

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Piezoelectric microcantilevers are specially popular in microelectromechanical system (MEMS) devices due to their high accuracy, environmental friendliness, low response time, and compatibility with compact designs. Since mass sensors are an important application of piezoelectric microcantilevers (PMCs), it is particularly important to determine PMCs sensitivity to nanoparticle absorption. For this purpose, a dynamic analysis was carried out to derive the equation governing vibrations of a PMC in air and water environments. A sphere chain model was used to model hydrodynamic forces acting on the PMC. In order to utilize the bending of the PMC for determining the output current from the piezoelectric layer, the resulting equation was solved by taking into account how the PMC geometrical discontinuities affected eigenvalues. In addition to the sensitivity of natural frequency and amplitude of these sensors, sensitivity of output electric current from their piezoelectric layer is also important. Therefore, the sensitivity of these parameters to nanoparticle absorption was analyzed and compared so as to select the suitable parameter for achieving satisfactory performance of PMC mass sensors in air and liquid working environments. The importance of selecting proper geometrical dimensions in the design of PMC mass sensors is realized by considering the fact that their sensitivity can be enhanced by properly selecting their dimensions. Accordingly, the effects of geometrical dimensions of the sensor on its sensitivity were determined through Sobol sensitivity analysis. The simulation results indicated that the sensitivity of output current from the piezoelectric layer and that of the vibration amplitude in the first three modes were the suitable parameters determining the performance of the PMC mass sensor in air and fluid environments, respectively.

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Analytical modeling of mechanical behavior for MEMS/NEMS-based single-clamped multilayer resonators with symmetrical complex shapes

Cited by 4 publications

References 44 publications

Desain sensor massa resonator MEMS menggunakan struktur free-free beam

Desain sensor massa resonator MEMS menggunakan struktur free-free beam

Analytical Modeling of the Mechanical Behavior of MEMS/NEMS-Multilayered Resonators With Variable Cross-Sections for Sensors and Energy Harvesters

Vibration and sensitivity analysis of double-layered non-uniform piezoelectric microcantilever as a self-sensing mass sensor

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