Abstract:In the microelectronic semiconductor world we are bombarded with
reports of how the drive toward faster, denser, lower power-consuming and
more reliable semiconductor products will accelerate with time. This paper
discusses the instrumental evolution from visible light microscopy to
scanning electron microscopy and on to transmission electron microscopy
and scanned probe microscopy. The increased demands placed on specimen
preparation of precise locations in a semiconductor chip for microscopy
are discu… Show more
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