2020
DOI: 10.1002/mma.6658
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Analytical investigation of air squeeze film damping for bi‐axial micro‐scanner using eigenfunction expansion method

Abstract: Squeeze film damping is an important factor in the dynamic stability of the bi‐axial microelectromechanic systems. The purpose of this article is to provide an analytical solution for calculating the air squeeze film damping in bi‐axial torsional micro‐mirrors, considering the changes of pressure distribution in rotation around different axes. This is the first time that has been done for a circular micro‐mirror. One of the advantages of bi‐axis micro‐scanners compared to single‐axis types is the larger space … Show more

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Cited by 9 publications
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“…A fractionally damped beam has been analyzed by [32]. The influence of dispersion force and squeezed film damping was incorporated in the dynamic instability of the nanowire-fabricated sensor subjected to centrifugal and constant acceleration [33,34]. Even though Eq.…”
Section: Introductionmentioning
confidence: 99%
“…A fractionally damped beam has been analyzed by [32]. The influence of dispersion force and squeezed film damping was incorporated in the dynamic instability of the nanowire-fabricated sensor subjected to centrifugal and constant acceleration [33,34]. Even though Eq.…”
Section: Introductionmentioning
confidence: 99%