Analytical design of linear variable capacitors with shaped-finger comb-drive actuators

Hah, Dooyoung

doi:10.1109/dtip.2018.8394217

Cited by 4 publications

(1 citation statement)

References 21 publications

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“…The conformal mapping technique [27] can be used to solve for an analytical solution of the electric field distribution in a multi-electrode system, but using the analytical result in a mathematical model of the microstructure is cumbersome [28].…”

Section: Introductionmentioning

confidence: 99%

Experimental Characterization of the Electrostatic Levitation Force in MEMS Transducers

Daeichin

Miles

Towfighian

2020

Journal of Vibration and Acoustics

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In this study, a two-step experimental procedure is described to determine the electrostatic levitation force in MEMS transducers. In these two steps, the microstructure is excited quasi-statically and dynamically and its response is used to derive the electrostatic force. The experimental results are obtained for a 1 by 1 plate that employs 112 levitation units. The experimentally obtained force is used in a lumped parameter model to find the microstructure response when it is subjected to different dynamical loads. The natural frequency and the damping ratios in the model are identified from the experimental results. The results show this procedure can be used as a method to extract the electrostatic force as a function of the microstructure's degrees of freedom. The procedure can be easily used for any microstructure with a wide variety of electrode configurations to predict the response of the system to any input excitation.

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Section: Introductionmentioning

confidence: 99%