Analytical Deflection Model and Parametric Optimization of a Circular Diaphragm-type Piezoactuator

Abstract

Abstract：With the theory of thin diaphragm deformation and the piezoelectric constitutive equation, under the constant voltage conditions, an analytical model on deflection of a circular piezoelectric actuator is proposed to investigate the stress distribution of the actuator. Based on the geometric parameters and material properties of the literatures, the model results agree with the literature experimental data and simulations within 10%. Furthermore, the accuracy of model results is also validated by experiments with the maximal offset less than 7%. Thus, the model results are used for studying the impacts on piezoelectric actuator displacement in the different parameters, which include the voltage, the radius ratio and the thickness of piezoelectric layer and elastic layer. The results show that: the displacement of circular piezoelectric actuator linearly varies with the voltage, and the optimized radius ratio of piezoelectric layer and elastic layer is 0.75 to obtain the maximal center displacement of circular piezoelectric actuator. Moreover, when the voltage, material properties and radius ratio are fixed, the impacts on the displacement of circular piezoelectric diaphragm under the different thickness of piezoelectric layer and elastic layer are analyzed. With the fixed thickness of the multi-layer, the optimal thickness ratio of piezoelectric layer and elastic layer is obtained by analytical model results. By analyzing the different influences of these parameters, the structure design of a circular piezoelectric actuator is guided and optimized.