Analytical closed form model for static pull-in analysis in electrostatically actuated torsional micromirrors

Moeenfard, Hamid; Ahmadian, Mohammad Taghi

doi:10.1007/s12206-013-0214-8

Cited by 12 publications

(10 citation statements)

References 17 publications

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“…H. Moeenfard and M.T. Ahmadian [29] studied the static pull-in and equilibrium behavior in electrostatically actuated torsional micromirrors. Perturbation method, the method of straight forward expansion is utilized to find the pull-in angle of the mirror.…”

Section: Introductionmentioning

confidence: 99%

On the buckling behavior of piezoelectric nanobeams: An exact solution

Jandaghian

Rahmani

2015

J Mech Sci Technol

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In this paper, thermoelectric-mechanical buckling behavior of the piezoelectric nanobeams is investigated based on the nonlocal theory and Euler-Bernoulli beam theory. The electric potential is assumed linear through the thickness of the nanobeam and the governing equations are derived by Hamilton's principle. The governing equations are solved analytically for different boundary conditions. The effects of the nonlocal parameter, temperature change, and external electric voltage on the critical buckling load of the piezoelectric nanobeams are discussed in detail. This study should be useful for the design of piezoelectric nanodevices.

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Section: Introductionmentioning

confidence: 99%

On the buckling behavior of piezoelectric nanobeams: An exact solution

Jandaghian

Rahmani

2015

J Mech Sci Technol

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“…Since the behavior of the squeeze film depends on the solution of Eq. (2), some research solved it and reported the pressure distribution and damping torque as a function of micromirror's characteristic for conditions similar with the present problem [3,7,11].…”

Section: Introductionmentioning

confidence: 57%

“…(11). Therefore, the general viscous dissipation function is the only effective parameter on irreversibility.…”

Section: Governing Equationsmentioning

confidence: 99%

“…Because of this actuation, the mirror plate is vibrated and the air film between the mirror and the substrate tends to squeeze into the environment. This action is prevented by the air's viscosity, which would lead to a nonuniform pressure distribution under the mirror and ultimately causes a damping torque opposing the torsion motion of the mirror [11,17,18]. Due to prevention of the pull-in behavior in micromirrors, the maximum tilting angle's amplitude is too small than the maximum rotational range of the mirror plate [11].…”

Section: Introductionmentioning

confidence: 99%

“…This action is prevented by the air's viscosity, which would lead to a nonuniform pressure distribution under the mirror and ultimately causes a damping torque opposing the torsion motion of the mirror [11,17,18]. Due to prevention of the pull-in behavior in micromirrors, the maximum tilting angle's amplitude is too small than the maximum rotational range of the mirror plate [11]. In various researches, the tilting angle discussed in two different ranges, infinitesimal tilting angle and finite tilting angle [3,4].…”

Section: Introductionmentioning

confidence: 99%

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